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β-SiC薄膜的生长速率及电阻温度特性
张清; 夏非
1990-11
Conference Name第三次全国功能陶瓷学术会议
Source Publication第三次全国功能陶瓷学术会议论文集
Conference Date1990-11
Conference Place苏州
Publisher中国电子学会
description.department中国科学院金属研究所
Keyword金刚砂 薄膜生长 生长速率 电阻 温度
Funding Organization中国电子学会
Language中文
Document Type会议论文
Identifierhttp://ir.imr.ac.cn/handle/321006/69600
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
张清,夏非. β-SiC薄膜的生长速率及电阻温度特性[C]:中国电子学会,1990.
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