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题名: Surface modification of POSS-polyimide hybrid films by atomic oxygen using ECR plasma
作者: S. W. Duo;  H. Ke;  T. Z. Liu;  M. M. Song;  M. S. Li
发表日期: 2013
刊名: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
相关网址: <Go to ISI>://WOS:000321722200072
Appears in Collections:中国科学院金属研究所_期刊论文

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Recommended Citation:
S. W. Duo,H. Ke,T. Z. Liu,et al. Surface Modification Of Poss-polyimide Hybrid Films By Atomic Oxygen Using Ecr Plasma[J]. Nuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials And Atoms,2013,307:323-+.

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