Surface modification of POSS-polyimide hybrid films by atomic oxygen using ECR plasma

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IMR OpenIR > 中国科学院金属研究所 > 期刊论文

题名:	Surface modification of POSS-polyimide hybrid films by atomic oxygen using ECR plasma
作者:	S. W. Duo; H. Ke; T. Z. Liu; M. M. Song; M. S. Li
发表日期:	2013
刊名:	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
相关网址:	<Go to ISI>://WOS:000321722200072
Appears in Collections:	中国科学院金属研究所_期刊论文

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Recommended Citation:

S. W. Duo,H. Ke,T. Z. Liu,et al. Surface Modification Of Poss-polyimide Hybrid Films By Atomic Oxygen Using Ecr Plasma[J]. Nuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials And Atoms,2013,307:323-+.

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