IMR OpenIR
Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film
X. H. Guo; K. Q. Du; H. Ge; Q. Z. Guo; Y. Wang; F. H. Wang
2013
Source PublicationElectrochemistry Communications
ISSN1388-2481
Volume28Pages:95-99
AbstractHumidity sensor based on thin micro-arc oxidation alumina (MOA) film was fabricated by a transient self-feedback control (TSFC) technique for the first time. The MOA film consisted of a polycrystalline nature of alpha and gamma-Al2O3 phases, while high surface/volume ratio led to remarkable adsorption of the MOA film. Moreover, the humidity performance of the MOA sensor indicated good sensitivity of 8045.55 at 98% RH. Fast response and recovery times of the MOA sensor were 90 s and 30 s, respectively, at 20 degrees C and 1000 Hz. Exposing the MOA sensor to different humidities for longer durations indicated an excellent stability due to the alpha-Al2O3 phase in the MOA film. The mechanism in the sensor, to humidity, was explained by using equivalent circuits of (RC) and (C(RZ)). In the low RH range, the process was mainly dominated by the migration of protons through the adsorbed water molecule layer on the surface of the MOA film; while, in the high RH range, the process was due to the faster diffusion of protons in the single or multiple layers that were formed on the materials surface. (C) 2012 Elsevier B.V. All rights reserved.
description.department[guo, xinghua ; du, keqin ; guo, quanzhong ; wang, yong ; wang, fuhui] chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china. [ge, hao] liaoning univ, liaoning key lab green synth & preparat chem adv, coll chem, shenyang 110036, peoples r china. ; du, kq (reprint author), chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china. ; kqdu@imr.ac.cn
KeywordHumidity Sensor Sensitivity Stability Micro-arc Oxidation Al2o3 Thin-films Al2o3 Anodization
URL查看原文
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/71235
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
X. H. Guo,K. Q. Du,H. Ge,et al. Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film[J]. Electrochemistry Communications,2013,28:95-99.
APA X. H. Guo,K. Q. Du,H. Ge,Q. Z. Guo,Y. Wang,&F. H. Wang.(2013).Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film.Electrochemistry Communications,28,95-99.
MLA X. H. Guo,et al."Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film".Electrochemistry Communications 28(2013):95-99.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[X. H. Guo]'s Articles
[K. Q. Du]'s Articles
[H. Ge]'s Articles
Baidu academic
Similar articles in Baidu academic
[X. H. Guo]'s Articles
[K. Q. Du]'s Articles
[H. Ge]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[X. H. Guo]'s Articles
[K. Q. Du]'s Articles
[H. Ge]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.