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题名: Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods
作者: H. Lei;  M. H. Wang;  Y. Hoshi;  T. Uchida;  S. Kobayashi;  Y. Sawada
发表日期: 2013
刊名: Applied Surface Science
相关网址: <Go to ISI>://WOS:000326579400040
Appears in Collections:中国科学院金属研究所_期刊论文

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Recommended Citation:
H. Lei,M. H. Wang,Y. Hoshi,et al. Comparative Studies On Damages To Organic Layer During The Deposition Of Ito Films By Various Sputtering Methods[J]. Applied Surface Science,2013,285:389-394.

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