Patterning flexible single-walled carbon nanotube thin films by an ozone gas exposure method

IMR OpenIR

	Patterning flexible single-walled carbon nanotube thin films by an ozone gas exposure method
	Y. Su; S. F. Pei; J. H. Du; W. B. Liu; C. Liu; H. M. Cheng
	2013
发表期刊	Carbon
ISSN	0008-6223
卷号	53 页码:4-10
摘要	Patterning is an essential and important process for the future use of single-walled carbon nanotube (SWCNT) thin films (TFs) in electronic devices. Different from traditional Si based electronic materials, SWCNTs can be easily etched when exposed to an oxidative atmosphere. Here we propose a gas exposure method to pattern SWCNT TFs on flexible polymeric substrates, without using vacuum and high temperature treatment. By simply exposing them to ozone for 3 mm, a high quality SWCNT TF (35-40 nm in thickness) pattern is obtained on a poly (ethylene terephthalate) substrate. It is found that the ozone can chemisorb on, functionalize and etch SWCNTs and then destroy the electrically conductive network of SWCNT TFs, which causes a fast resistance increase and achieves efficient SWCNT TF patterns. The proposed patterning method has the advantages of high efficiency, low cost and scale-up ability, and more importantly, it is suitable for assembling flexible electronic devices, indicating prospects for the low-cost and large-scale manufacture of such items. (C) 2012 Published by Elsevier Ltd.
部门归属	[su, yang ; pei, songfeng ; du, jinhong ; liu, wen-bin ; liu, chang ; cheng, hui-ming] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. ; cheng, hm (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. ; cheng@imr.ac.cn
关键词	Transparent Conductive Films Integrated-circuits Reduction Oxidation Arrays
URL	查看原文
语种	英语
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/71475
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. Su,S. F. Pei,J. H. Du,et al. Patterning flexible single-walled carbon nanotube thin films by an ozone gas exposure method[J]. Carbon,2013,53:4-10.
APA	Y. Su,S. F. Pei,J. H. Du,W. B. Liu,C. Liu,&H. M. Cheng.(2013).Patterning flexible single-walled carbon nanotube thin films by an ozone gas exposure method.Carbon,53,4-10.
MLA	Y. Su,et al."Patterning flexible single-walled carbon nanotube thin films by an ozone gas exposure method".Carbon 53(2013):4-10.