Synthesis and characterization of Y2O3 nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films

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	Synthesis and characterization of Y2O3 nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films
	J. C. Zhang; X. W. Li; Y. L. Wang; S. Liu
	2013
发表期刊	Applied Physics a-Materials Science & Processing
ISSN	0947-8396
卷号	110 期号:2 页码:465-470
摘要	Y2O3 nanoparticles and nanorods have been firstly synthesized in bulk Ti-Y films prepared by magnetron sputtering on Si (100) substrates at different temperatures. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and energy dispersive X-ray spectroscopy (EDS) are used to characterize the structure, morphology, and composition of the as-synthesized nanoparticles and nanorods. The mechanical properties of the sputtered films are investigated using nanoindentation techniques. The results indicate that both the nanoparticles and nanorods have a pure cubic Y2O3 structure resulting from the reaction of Y atoms with the residual O-2 in the vacuum chamber, and are free from defects and dislocations with uniform diameters of about 30 nm. The Y2O3 nanoparticles mainly distribute at the grain boundaries of the Ti matrix and the nanorods have lengths ranging from 250 nm to more than 1 mu m with the growth direction parallel to the (002) plane. As the growth temperature elevates, the nanoparticles turn to be coarsening while more and longer nanorods are inclined to form. Compared with the Ti film, the TiY films have a remarkable increase in hardness, but do not exhibit expected increase in elastic modulus. Finally, the growth mechanism is also briefly discussed.
部门归属	[zhang, jinchao ; li, xiongwei ; wang, yongli ; liu, shi] chinese acad sci, inst met res, mat special environm dept, shenyang 110016, peoples r china. ; liu, s (reprint author), chinese acad sci, inst met res, mat special environm dept, 72 wenhua rd, shenyang 110016, peoples r china. ; sliu@imr.ac.cn
关键词	Thin-films Growth Temperature Nanowires Nanostructures Segregation Mechanism Substrate Metals Phase
URL	查看原文
语种	英语
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/71680
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. C. Zhang,X. W. Li,Y. L. Wang,et al. Synthesis and characterization of Y2O3 nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films[J]. Applied Physics a-Materials Science & Processing,2013,110(2):465-470.
APA	J. C. Zhang,X. W. Li,Y. L. Wang,&S. Liu.(2013).Synthesis and characterization of Y2O3 nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films.Applied Physics a-Materials Science & Processing,110(2),465-470.
MLA	J. C. Zhang,et al."Synthesis and characterization of Y2O3 nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films".Applied Physics a-Materials Science & Processing 110.2(2013):465-470.