IMR OpenIR
Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings
J. Zhang; S. Mraz; J. H. Yao; J. M. Schneider
2014
Source PublicationVacuum
ISSN0042-207X
Volume101Pages:382-386
AbstractIn this work, the composition evolution of yttrium silicate coatings was investigated during r.f. sputtering from a gamma-Y2Si2O7 compound target, focusing on the effect of Ar pressure, target-substrate distance and r.f. power. By controlling the number of collisions between Ar gas and target species, glassy coatings with the stoichiometry of Y2SiO5 and Y2Si2O7 were obtained. Finally, the formation of X-2-Y2SiO5 on SiC substrates was observed after annealing the glassy coatings in air at 1250 degrees C. After annealing at 1550 degrees C gamma-Y2Si2O7 crystallized with high quality and grain boundaries appeared to be crack-free. (C) 2013 Elsevier Ltd. All rights reserved.
description.department[zhang, jie ; mraz, stanislav ; yao, jiahao ; schneider, jochen m.] rhein westfal th aachen, d-52074 aachen, germany. ; zhang, j (reprint author), chinese acad sci, high performance ceram div, inst met res, 72 wenhua rd, shenyang 110016, peoples r china. ; jiezhang@imr.ac.cn
KeywordYttrium Silicates R.f. Sputtering And Post-annealing Environmental Barrier Coatings Silicon-nitride Thin-films Temperature Deposition Composites Ceramics Stress Growth
URL查看原文
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/72507
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
J. Zhang,S. Mraz,J. H. Yao,et al. Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings[J]. Vacuum,2014,101:382-386.
APA J. Zhang,S. Mraz,J. H. Yao,&J. M. Schneider.(2014).Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings.Vacuum,101,382-386.
MLA J. Zhang,et al."Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings".Vacuum 101(2014):382-386.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[J. Zhang]'s Articles
[S. Mraz]'s Articles
[J. H. Yao]'s Articles
Baidu academic
Similar articles in Baidu academic
[J. Zhang]'s Articles
[S. Mraz]'s Articles
[J. H. Yao]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[J. Zhang]'s Articles
[S. Mraz]'s Articles
[J. H. Yao]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.