Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings

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	Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings
	J. Zhang; S. Mraz; J. H. Yao; J. M. Schneider
	2014
发表期刊	Vacuum
ISSN	0042-207X
卷号	101 页码:382-386
摘要	In this work, the composition evolution of yttrium silicate coatings was investigated during r.f. sputtering from a gamma-Y2Si2O7 compound target, focusing on the effect of Ar pressure, target-substrate distance and r.f. power. By controlling the number of collisions between Ar gas and target species, glassy coatings with the stoichiometry of Y2SiO5 and Y2Si2O7 were obtained. Finally, the formation of X-2-Y2SiO5 on SiC substrates was observed after annealing the glassy coatings in air at 1250 degrees C. After annealing at 1550 degrees C gamma-Y2Si2O7 crystallized with high quality and grain boundaries appeared to be crack-free. (C) 2013 Elsevier Ltd. All rights reserved.
部门归属	[zhang, jie ; mraz, stanislav ; yao, jiahao ; schneider, jochen m.] rhein westfal th aachen, d-52074 aachen, germany. ; zhang, j (reprint author), chinese acad sci, high performance ceram div, inst met res, 72 wenhua rd, shenyang 110016, peoples r china. ; jiezhang@imr.ac.cn
关键词	Yttrium Silicates R.f. Sputtering And Post-annealing Environmental Barrier Coatings Silicon-nitride Thin-films Temperature Deposition Composites Ceramics Stress Growth
URL	查看原文
语种	英语
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/72507
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. Zhang,S. Mraz,J. H. Yao,et al. Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings[J]. Vacuum,2014,101:382-386.
APA	J. Zhang,S. Mraz,J. H. Yao,&J. M. Schneider.(2014).Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings.Vacuum,101,382-386.
MLA	J. Zhang,et al."Synthesis of yttrium silicates by annealing r.f. sputtered glassy coatings".Vacuum 101(2014):382-386.