Thermal evolution of helium in magnetron sputtered titanium films

IMR OpenIR

	Thermal evolution of helium in magnetron sputtered titanium films
	J. C. Zhang; C. Cheng; E. D. Wu; L. Y. Xiong; S. Liu
	2014
发表期刊	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
ISSN	0168-583X
卷号	336 页码:6-11
摘要	Helium-containing titanium films synthesized by magnetron sputtering method were investigated using thermal desorption spectrometry (TDS), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). Helium evolution behaviors under thermal treatment from room temperature to 1500 C were characterized. Four peaks appeared in TDS at around 100, 420, 700, and 1250 degrees C were identified and attributed to helium desorption from the specimen surface, substitutional helium (helium atom in a vacancy), small HemVn clusters with different helium-to-vacancy ratios, and helium bubbles or voids, respectively. The helium evolution under thermal treatment composed of two coexisting and competing processes, where the faster process dominated in relevant temperature range, i.e. helium diffusion and release at low temperatures, and bubble or void formation at high temperatures. Three characteristic temperatures in TDS were identified in description of the phenomenon. (C) 2014 Elsevier B.V. All rights reserved.
部门归属	[zhang, jinchao ; cheng, chun ; wu, erdong ; xiong, liangyin ; liu, shi] chinese acad sci, inst met res, mat special environm dept, shenyang 110016, peoples r china. ; liu, s (reprint author), chinese acad sci, inst met res, mat special environm dept, 72 wenhua rd, shenyang 110016, peoples r china. ; sliu@imr.ac.cn
关键词	Helium Thermal Desorption Annealing Titanium Film High-temperature Ferritic Steels Metals Irradiation Behavior Desorption Release Implantation Mechanisms Migration
URL	查看原文
语种	英语
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/73493
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. C. Zhang,C. Cheng,E. D. Wu,et al. Thermal evolution of helium in magnetron sputtered titanium films[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,2014,336:6-11.
APA	J. C. Zhang,C. Cheng,E. D. Wu,L. Y. Xiong,&S. Liu.(2014).Thermal evolution of helium in magnetron sputtered titanium films.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,336,6-11.
MLA	J. C. Zhang,et al."Thermal evolution of helium in magnetron sputtered titanium films".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 336(2014):6-11.