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耐特种气体腐蚀涡旋干泵的研制
金花子; 吴杰; 南泉; 熊天英
2014-08-28
Source Publication低温与特气
Issue4Pages:16-18
Abstract采用化学镀、氟涂料和真空离子镀(PVD)技术对涡旋干泵实施防护涂层,对转子和定子采用化学镀镍磷和氟涂料封闭技术制备防护涂层;对曲柄轴和曲柄销采用PVD技术制备Cr/CrN多层复合防护镀层。通过腐蚀试验表明,防护涂层可以长时间抵抗高腐蚀性气体的腐蚀,能够有效地提高涡旋干泵的使用寿命。
description.department中国科学院金属研究所
Keyword特种气体 真空泵 腐蚀 防护涂层
Language中文
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/73599
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
金花子,吴杰,南泉,等. 耐特种气体腐蚀涡旋干泵的研制[J]. 低温与特气,2014(4):16-18.
APA 金花子,吴杰,南泉,&熊天英.(2014).耐特种气体腐蚀涡旋干泵的研制.低温与特气(4),16-18.
MLA 金花子,et al."耐特种气体腐蚀涡旋干泵的研制".低温与特气 .4(2014):16-18.
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