Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films

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	Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films
	D. L.; Lei Qi, H.; Wang, T. G.; Pei, Z. L.; Gong, J.; Sun, C.
	2015
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	31 期号:1 页码:55-64
摘要	The Cr-Mo-N films were deposited on high speed steel (HSS) substrates by a DC reactive magnetron sputtering equipment coupled with two horizontal magnetron sources. The effects of substrate negative bias voltage (V-b), substrate temperature (T-s) and gas flow ratio (R = N-2/(N-2 + Ar)) on the microstructure, morphology, as well as the mechanical and tribological properties of the Cr-Mo-N films were investigated by virtue of X-ray diffraction (XRD) analysis, X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), nano-indentation test, ball-on-disk tribometer, and Rockwell indenter et al. With increasing V-b to -100 V, the preferred orientation of the films changed from (111) to (200) and their mechanical and tribological properties were improved gradually, too. It was also found that Ts gave a significant effect on mechanical property enhancement. When the T-s reached 300 degrees C, the film obtained the highest hardness and effective elastic modulus of approximately 30.1 and 420.5 GPa, respectively and its critical load increased to about 54 N. With increasing R-,R- the phase transformation from body-centered-cubic (bcc) Cr and hexagonal CrMoNx multiphase to single face-centered-cubic (fcc) solid solution phase was observed. The correlations between values of hardness (H), effective elastic modulus (E), H/E, H-3/E*(2), elastic recovery (We) and tribological properties of the films were also investigated. The results showed that the elastic recovery played an important role in the tribological behavior.
部门归属	[qi, dongli ; lei, hao ; wang, tiegang ; pei, zhiliang ; gong, jun ; sun, chao] chinese acad sci, inst met res, surface engn mat div, shenyang 110016, peoples r china. ; pei, zl (reprint author), chinese acad sci, inst met res, surface engn mat div, shenyang 110016, peoples r china. ; zlpei@imr.ac.cn ; jgong@imr.ac.cn
关键词	Cr-mo-n Films Dc Magnetron Sputtering Hardness Critical Load Friction Coefficient Wear Nitride Thin-films Substrate Bias Nitrogen Flow Coatings Hardness Temperature Pvd Modulus Ratio Dc
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/73897
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	D. L.,Lei Qi, H.,Wang, T. G.,et al. Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films[J]. Journal of Materials Science & Technology,2015,31(1):55-64.
APA	D. L.,Lei Qi, H.,Wang, T. G.,Pei, Z. L.,Gong, J.,&Sun, C..(2015).Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films.Journal of Materials Science & Technology,31(1),55-64.
MLA	D. L.,et al."Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films".Journal of Materials Science & Technology 31.1(2015):55-64.