TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating

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	TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating
	Y. H.; Guo Zhao, C. Q.; Yang, W. J.; Chen, Y. Q.; Yu, B. H.
	2015
发表期刊	Vacuum
ISSN	0042-207X
卷号	112 页码:46-54
摘要	A magnetic field-enhanced arc ion plating (MFE-AIP) is utilized to deposit TiN films on the inner wall of a stainless-steel tube with inner diameter 36 mm and length from 108 to 288 mm. Three groups of magnetic field coils are designed and located at different positions, to produce axial magnetic field to focus and to guide the arc plasma beam to spread along the center axial direction of the tubular workpiece. Samples of AISI 304 stainless steel are horizontally placed inside the tube to investigate the structure and performance of the films. A pulse bias is applied to the substrate to accelerate the plasma. The structure, surface morphology, cross-sectional image, hardness and wear-resistant properties as a function of the position inside the tubes are investigated by X-ray diffraction (XRD), scanning electron microscope (SEM), nanoindenter, friction-tester, respectively. The results show that the film structures change from a single TiN phase into mixed phases of TIN and Ti2N with the increase in the distance to the tube entrance. The thickness, hardness and sliding friction coefficient of the films decrease with the increase in the distance to the tube entrance. The magnetic field-enhanced arc ion plating is shown to be an effective tool to treat the inner surface of stainless-steel tubes. (C) 2014 Elsevier Ltd. All rights reserved.
部门归属	[zhao, yanhui ; guo, chaoqian ; yang, wenjin ; chen, yuqiu ; yu, baohai] chinese acad sci, inst met res, shenyang 110016, peoples r china. ; zhao, yh (reprint author), chinese acad sci, inst met res, shenyang 110016, peoples r china. ; yhzhao@imr.ac.cn
关键词	Magnetic Field Arc Ion Plating Stainless-steel Tube Inner Wall Tin Films Cathodic Vacuum-arc Interior Surface Inner Wall Carbon-films Thin-films Substrate-temperature Residual-stresses Vapor-deposition Current-density Pvd Coatings
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/74038
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. H.,Guo Zhao, C. Q.,Yang, W. J.,et al. TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating[J]. Vacuum,2015,112:46-54.
APA	Y. H.,Guo Zhao, C. Q.,Yang, W. J.,Chen, Y. Q.,&Yu, B. H..(2015).TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating.Vacuum,112,46-54.
MLA	Y. H.,et al."TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating".Vacuum 112(2015):46-54.