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题名: Mechanical behavior related to various bonding states in amorphous Si-C-N hard films
作者: C. Q.;  Schlemper Zhuang, C.;  Fuchs, R.;  Zhang, L.;  Huang, N.;  Vogel, M.;  Staedler, T.;  Jiang, X.
发表日期: 2014
刊名: Surface & Coatings Technology
相关网址: <Go to ISI>://WOS:000346895000044
Appears in Collections:中国科学院金属研究所_期刊论文

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Recommended Citation:
C. Q.,Schlemper Zhuang, C.,Fuchs, R.,et al. Mechanical Behavior Related To Various Bonding States In Amorphous Si-c-n Hard Films[J]. Surface & Coatings Technology,2014,258:353-358.

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