| Characterization of boron doped diamond-like carbon film by HRTEM | |
| Li, X. J. ; He, L. L. ; Li, Y. S. ; Yang, Q. ; Hirose, A. | |
| Corresponding Author | lixj@alum.imr.ac.cn ; llhe@imr.ac.cn |
| 2015 | |
| Source Publication | APPLIED SURFACE SCIENCE
 |
| ISSN | 0169-4332 |
| Volume | 357Pages:2141-2146 |
| Abstract | Boron doped diamond-like carbon (B-DLC) film was synthesized on silicon (1 00) wafer by biased target ion beam deposition. High-resolution transmission electron microscopy (HRTEM) is employed to investigate the microstructure of the B-DLC thin film in cross-sectional observation. Many crystalline nanoparticles randomly dispersed and embedded in the amorphous matrix film are observed. Through chemical compositional analysis of the B-DLC film, some amount of O element is confirmed to be contained. And also, some nanoparticles with near zone axes are indexed, which are accordance with B2O phase. Therefore, the contained O element causing the B element oxidized is proposed, resulting in the formation of the nanoparticles. Our work indicates that in the B-DLC film a significant amount of the doped B element exists as boron suboxide nanoparticles. (C) 2015 Elsevier B.V. All rights reserved. |
| description.department | [li, x. j.] changchun univ technol, coll mat sci & engn, key lab adv struct mat, minist educ, changchun 130012, peoples r china ; [he, l. l.] chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china ; [li, y. s. ; yang, q.] univ saskatchewan, dept mech engn, saskatoon, sk s7n 5a9, canada ; [li, y. s. ; hirose, a.] univ saskatchewan, plasma phys lab, saskatoon, sk s7n 5e2, canada |
| Keyword | B doped DLC film Microstructure Suboxide HRTEM |
| Funding Organization | National Basic Research Program of China [2011CB605803, 2011CB605604]; Canada Research Chair Program; Natural Sciences and Engineering Research Council of Canada (NSERC) |
| Indexed By | sci |
| Language | 英语 |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/74662 |
| Collection | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | Li, X. J.,He, L. L.,Li, Y. S.,et al. Characterization of boron doped diamond-like carbon film by HRTEM[J]. APPLIED SURFACE SCIENCE,2015,357:2141-2146. |
| APA | Li, X. J.,He, L. L.,Li, Y. S.,Yang, Q.,&Hirose, A..(2015).Characterization of boron doped diamond-like carbon film by HRTEM.APPLIED SURFACE SCIENCE,357,2141-2146. |
| MLA | Li, X. J.,et al."Characterization of boron doped diamond-like carbon film by HRTEM".APPLIED SURFACE SCIENCE 357(2015):2141-2146. |
| Files in This Item: | There are no files associated with this item. | |||||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment