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Characterization of boron doped diamond-like carbon film by HRTEM
Li, X. J. ; He, L. L. ; Li, Y. S. ; Yang, Q. ; Hirose, A.
Corresponding Authorlixj@alum.imr.ac.cn ; llhe@imr.ac.cn
2015
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume357Pages:2141-2146
AbstractBoron doped diamond-like carbon (B-DLC) film was synthesized on silicon (1 00) wafer by biased target ion beam deposition. High-resolution transmission electron microscopy (HRTEM) is employed to investigate the microstructure of the B-DLC thin film in cross-sectional observation. Many crystalline nanoparticles randomly dispersed and embedded in the amorphous matrix film are observed. Through chemical compositional analysis of the B-DLC film, some amount of O element is confirmed to be contained. And also, some nanoparticles with near zone axes are indexed, which are accordance with B2O phase. Therefore, the contained O element causing the B element oxidized is proposed, resulting in the formation of the nanoparticles. Our work indicates that in the B-DLC film a significant amount of the doped B element exists as boron suboxide nanoparticles. (C) 2015 Elsevier B.V. All rights reserved.
description.department[li, x. j.] changchun univ technol, coll mat sci & engn, key lab adv struct mat, minist educ, changchun 130012, peoples r china ; [he, l. l.] chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china ; [li, y. s. ; yang, q.] univ saskatchewan, dept mech engn, saskatoon, sk s7n 5a9, canada ; [li, y. s. ; hirose, a.] univ saskatchewan, plasma phys lab, saskatoon, sk s7n 5e2, canada
KeywordB doped DLC film Microstructure Suboxide HRTEM
Funding OrganizationNational Basic Research Program of China [2011CB605803, 2011CB605604]; Canada Research Chair Program; Natural Sciences and Engineering Research Council of Canada (NSERC)
Indexed Bysci
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/74662
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Li, X. J.,He, L. L.,Li, Y. S.,et al. Characterization of boron doped diamond-like carbon film by HRTEM[J]. APPLIED SURFACE SCIENCE,2015,357:2141-2146.
APA Li, X. J.,He, L. L.,Li, Y. S.,Yang, Q.,&Hirose, A..(2015).Characterization of boron doped diamond-like carbon film by HRTEM.APPLIED SURFACE SCIENCE,357,2141-2146.
MLA Li, X. J.,et al."Characterization of boron doped diamond-like carbon film by HRTEM".APPLIED SURFACE SCIENCE 357(2015):2141-2146.
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