Characterization of boron doped diamond-like carbon film by HRTEM

IMR OpenIR

	Characterization of boron doped diamond-like carbon film by HRTEM
	Li, X. J.; He, L. L.; Li, Y. S.; Yang, Q.; Hirose, A.; lixj@alum.imr.ac.cn; llhe@imr.ac.cn
	2015
发表期刊	APPLIED SURFACE SCIENCE
ISSN	0169-4332
卷号	357 页码:2141-2146
摘要	Boron doped diamond-like carbon (B-DLC) film was synthesized on silicon (1 00) wafer by biased target ion beam deposition. High-resolution transmission electron microscopy (HRTEM) is employed to investigate the microstructure of the B-DLC thin film in cross-sectional observation. Many crystalline nanoparticles randomly dispersed and embedded in the amorphous matrix film are observed. Through chemical compositional analysis of the B-DLC film, some amount of O element is confirmed to be contained. And also, some nanoparticles with near zone axes are indexed, which are accordance with B2O phase. Therefore, the contained O element causing the B element oxidized is proposed, resulting in the formation of the nanoparticles. Our work indicates that in the B-DLC film a significant amount of the doped B element exists as boron suboxide nanoparticles. (C) 2015 Elsevier B.V. All rights reserved.
部门归属	[li, x. j.] changchun univ technol, coll mat sci & engn, key lab adv struct mat, minist educ, changchun 130012, peoples r china ; [he, l. l.] chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china ; [li, y. s. ; yang, q.] univ saskatchewan, dept mech engn, saskatoon, sk s7n 5a9, canada ; [li, y. s. ; hirose, a.] univ saskatchewan, plasma phys lab, saskatoon, sk s7n 5e2, canada
关键词	b Doped Dlc Film Microstructure Suboxide Hrtem
资助者	National Basic Research Program of China [2011CB605803, 2011CB605604]; Canada Research Chair Program; Natural Sciences and Engineering Research Council of Canada (NSERC)
收录类别	sci
语种	英语
WOS记录号	WOS:000366219700106
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/74662
专题	中国科学院金属研究所
通讯作者	lixj@alum.imr.ac.cn; llhe@imr.ac.cn
推荐引用方式 GB/T 7714	Li, X. J.,He, L. L.,Li, Y. S.,et al. Characterization of boron doped diamond-like carbon film by HRTEM[J]. APPLIED SURFACE SCIENCE,2015,357:2141-2146.
APA	Li, X. J..,He, L. L..,Li, Y. S..,Yang, Q..,Hirose, A..,...&llhe@imr.ac.cn.(2015).Characterization of boron doped diamond-like carbon film by HRTEM.APPLIED SURFACE SCIENCE,357,2141-2146.
MLA	Li, X. J.,et al."Characterization of boron doped diamond-like carbon film by HRTEM".APPLIED SURFACE SCIENCE 357(2015):2141-2146.