Effects of Pulse Bias Duty Cycle on Composition, Structure and Hardness of Ti-Cu-N Nanocomposite Films Deposited by Pulse Biased Arc Ion Plating

IMR OpenIR

	Effects of Pulse Bias Duty Cycle on Composition, Structure and Hardness of Ti-Cu-N Nanocomposite Films Deposited by Pulse Biased Arc Ion Plating
	Wang, W.; Zhao, Y. H.; Fu, Z. B.; Yang, W. J.; Yu, B. H.; Liu, T. A.; wangwei_ustb@l26.com
	2015
发表期刊	MATERIALS TRANSACTIONS
ISSN	1345-9678
卷号	56 期号:10 页码:132-136
摘要	Hard nanocomposite Ti-Cu-N films were deposited on high-speed-steel (HSS) substrates by pulse biased arc ion plating with a single multi-component Ti-Cu (88/12 at%) alloyed target. The effects of pulse bias duty cycle on the elemental content, structure and mechanical properties of the deposited films were investigated. The Cu atom content of the Ti-Cu-N films was analyzed using an electron probe microanalyzer (EPMA). The structure of the films was determined by X-ray diffraction (XRD) and their hardness and elastic modulus were measured using a nanoindenter. Under pulse bias voltages of -300V and -600V, the Cu content decreased with an increase in the duty cycle from 10% to 50%. The XPS spectra of Cu 2p for the Ti-Cu-N films showed that only pure metallic Cu was present. With an increase in the pulse duty cycle from 30% to 50%, the diffraction peaks of TiN in the preferred orientations (111) and (220) were observed, for pulse bias voltages of -300 V and -600V, respectively. Furthermore, no obvious sign of the metallic copper phase was observed in the XRD patterns. Under both pulse bias voltages of -300 V and -600 V, the value of hardness showed first an increase and then a decrease with an increase in the duty cycle from 10% to 50%. The maximum hardness value observed was 31.5 GPa, which was obtained for a 30% duty cycle under a pulse bias voltage of -600 V.
部门归属	[wang, w. ; fu, z. b. ; liu, t. a.] northeast dianli univ, dept chem engn, jilin 132012, peoples r china ; [zhao, y. h. ; yang, w. j. ; yu, b. h.] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Pulse Biased Arc Ion Plating Duty Cycle Titanium-copper-nitrogen Nanocomposite Films Hardness
资助者	Science and Technology Development Project of Jilin Provincial Science and Technology Department [20140520100JH, 20140204043GX]; Science and Technology Development Project of Jilin Municipal Science and Technology Bureau [201467008]; Research Fund for the Doctoral Program of Northeast Dianli University [BSJXM-201224]
收录类别	sci
语种	英语
WOS记录号	WOS:000365380900019
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/74791
专题	中国科学院金属研究所
通讯作者	wangwei_ustb@l26.com
推荐引用方式 GB/T 7714	Wang, W.,Zhao, Y. H.,Fu, Z. B.,et al. Effects of Pulse Bias Duty Cycle on Composition, Structure and Hardness of Ti-Cu-N Nanocomposite Films Deposited by Pulse Biased Arc Ion Plating[J]. MATERIALS TRANSACTIONS,2015,56(10):132-136.
APA	Wang, W..,Zhao, Y. H..,Fu, Z. B..,Yang, W. J..,Yu, B. H..,...&wangwei_ustb@l26.com.(2015).Effects of Pulse Bias Duty Cycle on Composition, Structure and Hardness of Ti-Cu-N Nanocomposite Films Deposited by Pulse Biased Arc Ion Plating.MATERIALS TRANSACTIONS,56(10),132-136.
MLA	Wang, W.,et al."Effects of Pulse Bias Duty Cycle on Composition, Structure and Hardness of Ti-Cu-N Nanocomposite Films Deposited by Pulse Biased Arc Ion Plating".MATERIALS TRANSACTIONS 56.10(2015):132-136.