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Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating
Lang, W. C.; Gao, B.; Du, H.; Xiao, J. Q.; Li, M. X.; Wang, X. H.
2015
Source PublicationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
ISSN1533-4880
Volume15Issue:9Pages:7357-7362
AbstractMacroparticle contamination deteriorates the qualities and performances of protective coatings by arc ion plating, resulting in a limitation in their applications. In this work, the effects of transverse magnetic field (TMF), pulsed bias, gas pressure, and substrate position on behavior of the macroparticles (MPs) in TiN films are quantitatively investigated. It is demonstrated that the key factor of the deposition process on the MPs behavior is magnetic field, which controls the movement of arc spot significantly. At relatively low magnetic field intensity, the MPs behavior is greatly influenced by the other three process parameters. The sensibilities of the three parameters on MPs behavior are decreased with the increasing magnetic field intensity. At high magnetic field intensity, the MPs distribution keeps almost the same even when the other parameters are varied.
description.department[lang, w. c. ; gao, b. ; li, m. x. ; wang, x. h.] wenzhou vocat & tech coll, key lab mat proc & mould technol, wenzhou 325035, peoples r china ; [du, h. ; xiao, j. q.] chinese acad sci, inst met res, shenyang 110016, peoples r china
KeywordArc Ion Plating Transverse Magnetic Field (Tmf) Pulsed Bias Nitrogen Partial Pressure Substrate Position Macro-particles Reduction
Funding OrganizationNatural Science Foundation of Zhejiang Province [LQ12E01003]; National Natural Science Foundation of China [51171197]
Indexed Bysci
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/74932
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Lang, W. C.,Gao, B.,Du, H.,et al. Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2015,15(9):7357-7362.
APA Lang, W. C.,Gao, B.,Du, H.,Xiao, J. Q.,Li, M. X.,&Wang, X. H..(2015).Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,15(9),7357-7362.
MLA Lang, W. C.,et al."Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 15.9(2015):7357-7362.
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