Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating

IMR OpenIR

	Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating
	Lang, W. C.; Gao, B.; Du, H.; Xiao, J. Q.; Li, M. X.; Wang, X. H.
	2015
发表期刊	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
ISSN	1533-4880
卷号	15 期号:9 页码:7357-7362
摘要	Macroparticle contamination deteriorates the qualities and performances of protective coatings by arc ion plating, resulting in a limitation in their applications. In this work, the effects of transverse magnetic field (TMF), pulsed bias, gas pressure, and substrate position on behavior of the macroparticles (MPs) in TiN films are quantitatively investigated. It is demonstrated that the key factor of the deposition process on the MPs behavior is magnetic field, which controls the movement of arc spot significantly. At relatively low magnetic field intensity, the MPs behavior is greatly influenced by the other three process parameters. The sensibilities of the three parameters on MPs behavior are decreased with the increasing magnetic field intensity. At high magnetic field intensity, the MPs distribution keeps almost the same even when the other parameters are varied.
部门归属	[lang, w. c. ; gao, b. ; li, m. x. ; wang, x. h.] wenzhou vocat & tech coll, key lab mat proc & mould technol, wenzhou 325035, peoples r china ; [du, h. ; xiao, j. q.] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Arc Ion Plating Transverse Magnetic Field (Tmf) Pulsed Bias Nitrogen Partial Pressure Substrate Position Macro-particles Reduction
资助者	Natural Science Foundation of Zhejiang Province [LQ12E01003]; National Natural Science Foundation of China [51171197]
收录类别	sci
语种	英语
WOS记录号	WOS:000365554400153
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/74932
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Lang, W. C.,Gao, B.,Du, H.,et al. Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2015,15(9):7357-7362.
APA	Lang, W. C.,Gao, B.,Du, H.,Xiao, J. Q.,Li, M. X.,&Wang, X. H..(2015).Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,15(9),7357-7362.
MLA	Lang, W. C.,et al."Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 15.9(2015):7357-7362.