Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs

IMR OpenIR

	Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs
	Guo, C. Q.; Pei, Z. L.; Fan, D.; Gong, J.; Sun, C.; csun@imr.ac.cn
	2015
发表期刊	DIAMOND AND RELATED MATERIALS
ISSN	0925-9635
卷号	60 页码:66-74
摘要	Alternating multilayer diamond-like carbon (DLC) films [(Cr, N)-DLC/DLC] with different sp(3) contents in DLC layer have been prepared on YG8 (WC-Co) substrates by FCVA combined with DCVA technique. The structure was investigated by scanning electron microscopy and transmission electron microscopy. Chemical bonding was studied by Raman spectroscopy and X-ray photoelectron spectroscopy. Mechanical and tribological properties including residual stress, hardness, adhesion strength and wear resistance were evaluated by film stress tester, nanoindenter, scratch tester, ball-on-disk tribometer and surface profiler. The results showed that (Cr, N)-DLC layer had the composite structure of amorphous phase as base interspersed with a small amount of nano-crystals. The co-doping of Cr and N into DLC reduced the film's residual stress from -1.62 GPa to -0.99 GPa. For monolayer DLC, both the sp(3) content and residual stress decreased as the substrate's bias voltage increased in the range of -100 V to -600 V. And the decrease of sp(3) content contributed to an increase of the (Cr, N)-DLC/DLC films' toughness. In addition, the multilayer films presented good adhesion strength on YG8 substrates. The wear rates of all multilayer films belonged to the order of magnitude of 10(-7) mm(3)/Nm. Prime novelty statement: Multilayer films consisting of DLC and DLC co-doped with metal and nonmetal atoms [(Cr, N)-DLC/DLC multilayer films] have been prepared by FCVA combined with DCVA technique and investigated systematically. The composite structure of the (Cr, N)-DLC layer is based on amorphous phase and contains a small number of nano-crystalline compounds of chromium. (C) 2015 Elsevier B.V. All rights reserved.
部门归属	[guo, c. q. ; pei, z. l. ; fan, d. ; gong, j. ; sun, c.] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Dlc Arc Multilayer Doping Residual Stress Wear
资助者	National Key Basic Research Program of China (973 Program) [2012CB625100]; Natural Science Foundation of Liaoning Province of China [2013020093]
收录类别	sci
语种	英语
WOS记录号	WOS:000367027700010
引用统计	被引频次：49[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/74982
专题	中国科学院金属研究所
通讯作者	csun@imr.ac.cn
推荐引用方式 GB/T 7714	Guo, C. Q.,Pei, Z. L.,Fan, D.,et al. Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs[J]. DIAMOND AND RELATED MATERIALS,2015,60:66-74.
APA	Guo, C. Q.,Pei, Z. L.,Fan, D.,Gong, J.,Sun, C.,&csun@imr.ac.cn.(2015).Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs.DIAMOND AND RELATED MATERIALS,60,66-74.
MLA	Guo, C. Q.,et al."Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs".DIAMOND AND RELATED MATERIALS 60(2015):66-74.