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Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films
Hamaguchi, D; Kobayashi, S; Uchida, T; Sawada, Y; Lei, H; Hoshi, Y; Hoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
2016-10-01
发表期刊JAPANESE JOURNAL OF APPLIED PHYSICS
ISSN0021-4922
卷号55期号:10
摘要In this study, we investigated the degradation mechanisms of the luminance performance of organic light-emitting diodes (OLEDs) when their top electrode films were deposited by sputter deposition process. During the sputter deposition of the top electrode films, the suppression of the incidence of high-energy electrons on the substrate was attempted using various methods. As a result, we found that during electrode deposition, the incidence of the high-energy secondary electrons, which were emitted from the target surface, on the substrate was the main cause of the significant degradation of the luminance performance. It was also found that the application of a magnetic field by setting permanent magnets near the substrate holder and the insertion of a shield plate near the target cathode were effective in suppressing the incidence of secondary electrons on the substrate. (C) 2016 The Japan Society of Applied Physics
部门归属[hamaguchi, daichi ; kobayashi, shin-ichi ; uchida, takayuki ; sawada, yutaka ; hoshi, yoichi] tokyo polytech univ, atsugi, kanagawa 2430213, japan ; [lei, hao] chinese acad sci, inst met res, shenyang 110016, peoples r china
学科领域Physics, Applied
资助者Ministry of Education, Culture, Sports, Science and Technology of Japan [15K04682]
收录类别sci
语种英语
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/76253
专题中国科学院金属研究所
通讯作者Hoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
推荐引用方式
GB/T 7714
Hamaguchi, D,Kobayashi, S,Uchida, T,et al. Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2016,55(10).
APA Hamaguchi, D.,Kobayashi, S.,Uchida, T.,Sawada, Y.,Lei, H.,...&Hoshi, Y .(2016).Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films.JAPANESE JOURNAL OF APPLIED PHYSICS,55(10).
MLA Hamaguchi, D,et al."Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films".JAPANESE JOURNAL OF APPLIED PHYSICS 55.10(2016).
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