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Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films
Hamaguchi, D; Kobayashi, S; Uchida, T; Sawada, Y; Lei, H; Hoshi, Y; Hoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
2016-10-01
Source PublicationJAPANESE JOURNAL OF APPLIED PHYSICS
ISSN0021-4922
Volume55Issue:10
AbstractIn this study, we investigated the degradation mechanisms of the luminance performance of organic light-emitting diodes (OLEDs) when their top electrode films were deposited by sputter deposition process. During the sputter deposition of the top electrode films, the suppression of the incidence of high-energy electrons on the substrate was attempted using various methods. As a result, we found that during electrode deposition, the incidence of the high-energy secondary electrons, which were emitted from the target surface, on the substrate was the main cause of the significant degradation of the luminance performance. It was also found that the application of a magnetic field by setting permanent magnets near the substrate holder and the insertion of a shield plate near the target cathode were effective in suppressing the incidence of secondary electrons on the substrate. (C) 2016 The Japan Society of Applied Physics
description.department[hamaguchi, daichi ; kobayashi, shin-ichi ; uchida, takayuki ; sawada, yutaka ; hoshi, yoichi] tokyo polytech univ, atsugi, kanagawa 2430213, japan ; [lei, hao] chinese acad sci, inst met res, shenyang 110016, peoples r china
Subject AreaPhysics, Applied
Funding OrganizationMinistry of Education, Culture, Sports, Science and Technology of Japan [15K04682]
Indexed Bysci
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/76253
Collection中国科学院金属研究所
Corresponding AuthorHoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
Recommended Citation
GB/T 7714
Hamaguchi, D,Kobayashi, S,Uchida, T,et al. Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2016,55(10).
APA Hamaguchi, D.,Kobayashi, S.,Uchida, T.,Sawada, Y.,Lei, H.,...&Hoshi, Y .(2016).Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films.JAPANESE JOURNAL OF APPLIED PHYSICS,55(10).
MLA Hamaguchi, D,et al."Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films".JAPANESE JOURNAL OF APPLIED PHYSICS 55.10(2016).
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