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Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers
Du, XM; Wang, MP; Wang, Y; Li, XX; Zhang, Z; Zhang, G; Huang, CQ; Wu, ED; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
2016-09-01
Source PublicationSURFACE AND INTERFACE ANALYSIS
ISSN0142-2421
Volume48Issue:9Pages:1012-1016
AbstractAlternate CrAlN/TiAlNmultilayerswith different repeated bilayer thickness ranging from10 to 20nmwere prepared by sputtering Ti, Al and Cr targets with N-2 and Ar gases. The interface structures of multilayers such as the average individual thicknesses, the scattering length densities and interface roughness were characterized using nonpolarized specular neutron reflectometry. The experimental reflectivity can be well described by a multilayer model for all samples. The individual thickness in the repeated bilayers is close to the nominal thickness. The interface roughness diminishes as the thickness of the bilayer in mutilayers decreases. The asymmetric interface roughness on CrAlN-TiAlN-Si interfaces causes the larger interface roughness of CrAlN on TiAlN interface. The scattering length density profiles of multilayers suggest that the chemical composition is approximate to Cr0.86Al0.14N/Ti0.5Al0.5N and which is more accurate for thinner films. Copyright (C) 2016 John Wiley & Sons, Ltd.
description.department[du, xiaoming ; wang, minpeng ; zhang, gang] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china ; [wang, yan ; li, xinxi ; huang, chaoqiang] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china ; [zhang, zhong] tongji univ, inst precis opt engn, shanghai 200092, peoples r china ; [wu, erdong] chinese acad sci, inst met res, shenyang 110016, peoples r china
KeywordCraln/tialn Multilayer Neutron Reflectometry Interface Structure
Subject AreaChemistry, Physical
Funding OrganizationNPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]
Indexed Bysci
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/76287
Collection中国科学院金属研究所
Corresponding AuthorDu, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
Recommended Citation
GB/T 7714
Du, XM,Wang, MP,Wang, Y,et al. Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers[J]. SURFACE AND INTERFACE ANALYSIS,2016,48(9):1012-1016.
APA Du, XM.,Wang, MP.,Wang, Y.,Li, XX.,Zhang, Z.,...&Du, XM .(2016).Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers.SURFACE AND INTERFACE ANALYSIS,48(9),1012-1016.
MLA Du, XM,et al."Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers".SURFACE AND INTERFACE ANALYSIS 48.9(2016):1012-1016.
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