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Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers
Du, XM; Wang, MP; Wang, Y; Li, XX; Zhang, Z; Zhang, G; Huang, CQ; Wu, ED; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
2016-09-01
发表期刊SURFACE AND INTERFACE ANALYSIS
ISSN0142-2421
卷号48期号:9页码:1012-1016
摘要Alternate CrAlN/TiAlNmultilayerswith different repeated bilayer thickness ranging from10 to 20nmwere prepared by sputtering Ti, Al and Cr targets with N-2 and Ar gases. The interface structures of multilayers such as the average individual thicknesses, the scattering length densities and interface roughness were characterized using nonpolarized specular neutron reflectometry. The experimental reflectivity can be well described by a multilayer model for all samples. The individual thickness in the repeated bilayers is close to the nominal thickness. The interface roughness diminishes as the thickness of the bilayer in mutilayers decreases. The asymmetric interface roughness on CrAlN-TiAlN-Si interfaces causes the larger interface roughness of CrAlN on TiAlN interface. The scattering length density profiles of multilayers suggest that the chemical composition is approximate to Cr0.86Al0.14N/Ti0.5Al0.5N and which is more accurate for thinner films. Copyright (C) 2016 John Wiley & Sons, Ltd.
部门归属[du, xiaoming ; wang, minpeng ; zhang, gang] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china ; [wang, yan ; li, xinxi ; huang, chaoqiang] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china ; [zhang, zhong] tongji univ, inst precis opt engn, shanghai 200092, peoples r china ; [wu, erdong] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词Craln/tialn Multilayer Neutron Reflectometry Interface Structure
学科领域Chemistry, Physical
资助者NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]
收录类别sci
语种英语
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/76287
专题中国科学院金属研究所
通讯作者Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
推荐引用方式
GB/T 7714
Du, XM,Wang, MP,Wang, Y,et al. Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers[J]. SURFACE AND INTERFACE ANALYSIS,2016,48(9):1012-1016.
APA Du, XM.,Wang, MP.,Wang, Y.,Li, XX.,Zhang, Z.,...&Du, XM .(2016).Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers.SURFACE AND INTERFACE ANALYSIS,48(9),1012-1016.
MLA Du, XM,et al."Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers".SURFACE AND INTERFACE ANALYSIS 48.9(2016):1012-1016.
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