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一种用于电弧离子镀沉积磁性材料涂层的复合靶材及应用
孙超、常正凯、肖金泉、宫骏
2015-01-07
Rights Holder孙超、常正凯、肖金泉、宫骏
Date Available2015-01-07
Country中国
Subtype发明
description.department中国科学院金属研究所
Application Date2013-01-10
Language中文
Application Number2013 10009959.7
Document Type专利
Identifierhttp://ir.imr.ac.cn/handle/321006/76626
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
孙超、常正凯、肖金泉、宫骏. 一种用于电弧离子镀沉积磁性材料涂层的复合靶材及应用[P]. 2015-01-07.
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