| 用等离子体增强化学气相沉积在长管内表面沉积薄膜方法 | |
| 赵彦辉、于宝海、肖金泉 | |
| 2015-07-08 | |
| Rights Holder | 赵彦辉、于宝海、肖金泉 |
| Date Available | 2015-07-08 |
| Country | 中国 |
| Subtype | 发明 |
| description.department | 中国科学院金属研究所 |
| Application Date | 2013-07-31 |
| Language | 中文 |
| Application Number | 2013 10329125.4 |
| Document Type | 专利 |
| Identifier | http://ir.imr.ac.cn/handle/321006/76690 |
| Collection | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | 赵彦辉、于宝海、肖金泉. 用等离子体增强化学气相沉积在长管内表面沉积薄膜方法[P]. 2015-07-08. |
| Files in This Item: | There are no files associated with this item. | |||||
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