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题名: NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS
作者: Du, X. M.;  Zheng, K. F.;  Wang, Y.;  Li, X. X.;  Wang, M. P.;  Zhang, G.;  Wu, E. D.
发表日期: 2017
摘要: Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.
刊名: DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
Appears in Collections:中国科学院金属研究所_期刊论文

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Recommended Citation:
Du, X. M.,Zheng, K. F.,Wang, Y.,et al. Neutron And X-ray Reflectometry For The Investigation Of Nano-scale Hard Multilayers[J]. Digest Journal Of Nanomaterials And Biostructures,2017,12(2):265-272.

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