IMR OpenIR
NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS
Du, X. M.; Zheng, K. F.; Wang, Y.; Li, X. X.; Wang, M. P.; Zhang, G.; Wu, E. D.; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
2017
发表期刊DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
ISSN1842-3582
卷号12期号:2页码:265-272
摘要Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.; Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.
部门归属[du, x. m. ; zheng, k. f. ; wang, m. p. ; zhang, g.] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china ; [wang, y. ; li, x. x.] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china ; [wu, e. d.] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词Hard Multilayer Neutron And X-ray Reflectometry Interfacial Structures
学科领域Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
资助者NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]; Research Foundation of Education Bureau of Liaoning Province, China [LG201620]
收录类别SCI
语种英语
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/77921
专题中国科学院金属研究所
通讯作者Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
推荐引用方式
GB/T 7714
Du, X. M.,Zheng, K. F.,Wang, Y.,et al. NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS[J]. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,2017,12(2):265-272.
APA Du, X. M..,Zheng, K. F..,Wang, Y..,Li, X. X..,Wang, M. P..,...&Du, XM .(2017).NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS.DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,12(2),265-272.
MLA Du, X. M.,et al."NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS".DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES 12.2(2017):265-272.
条目包含的文件
条目无相关文件。
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Du, X. M.]的文章
[Zheng, K. F.]的文章
[Wang, Y.]的文章
百度学术
百度学术中相似的文章
[Du, X. M.]的文章
[Zheng, K. F.]的文章
[Wang, Y.]的文章
必应学术
必应学术中相似的文章
[Du, X. M.]的文章
[Zheng, K. F.]的文章
[Wang, Y.]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。