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NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS
Du, X. M.; Zheng, K. F.; Wang, Y.; Li, X. X.; Wang, M. P.; Zhang, G.; Wu, E. D.; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
2017
Source PublicationDIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
ISSN1842-3582
Volume12Issue:2Pages:265-272
AbstractNeutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.; Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.
description.department[du, x. m. ; zheng, k. f. ; wang, m. p. ; zhang, g.] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china ; [wang, y. ; li, x. x.] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china ; [wu, e. d.] chinese acad sci, inst met res, shenyang 110016, peoples r china
KeywordHard Multilayer Neutron And X-ray Reflectometry Interfacial Structures
Subject AreaNanoscience & Nanotechnology ; Materials Science, Multidisciplinary
Funding OrganizationNPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]; Research Foundation of Education Bureau of Liaoning Province, China [LG201620]
Indexed BySCI
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/77921
Collection中国科学院金属研究所
Corresponding AuthorDu, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
Recommended Citation
GB/T 7714
Du, X. M.,Zheng, K. F.,Wang, Y.,et al. NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS[J]. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,2017,12(2):265-272.
APA Du, X. M..,Zheng, K. F..,Wang, Y..,Li, X. X..,Wang, M. P..,...&Du, XM .(2017).NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS.DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,12(2),265-272.
MLA Du, X. M.,et al."NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS".DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES 12.2(2017):265-272.
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