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Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing
Li, Yueming; Qian, Yuhai; Zhao, Guorui; Xu, Jingjun; Li, Meishuan; Li, MS (reprint author), 72 Wenhua Rd, Shenyang 110016, Peoples R China.
2017-06-01
发表期刊CERAMICS INTERNATIONAL
ISSN0272-8842
卷号43期号:8页码:6622-6625
摘要An Nb2AlC coating was deposited on polycrystalline Al2O5 by a two-step method. Firstly, an amorphous Nb-Al-C coating was deposited by DC magnetron sputtering at room temperature from an Nb2AlC compound target, and then a crystalline Nb2AlC coating was obtained by subsequent annealing at 800 degrees C in Ar. The formation temperature of crystalline Nb2AlC in sputtering deposition was much lower than in hot pressing. The polycrystalline coating exhibited nano-size grains with arbitrary orientation. XRD, Raman spectroscopy, SEM and TEM were used to characterize the components and microstructures of the coatings.; An Nb2AlC coating was deposited on polycrystalline Al2O5 by a two-step method. Firstly, an amorphous Nb-Al-C coating was deposited by DC magnetron sputtering at room temperature from an Nb2AlC compound target, and then a crystalline Nb2AlC coating was obtained by subsequent annealing at 800 degrees C in Ar. The formation temperature of crystalline Nb2AlC in sputtering deposition was much lower than in hot pressing. The polycrystalline coating exhibited nano-size grains with arbitrary orientation. XRD, Raman spectroscopy, SEM and TEM were used to characterize the components and microstructures of the coatings.
部门归属[li, yueming ; qian, yuhai ; zhao, guorui ; xu, jingjun ; li, meishuan] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china ; [li, yueming ; zhao, guorui] univ chinese acad sci, beijing 100039, peoples r china
关键词Nb2alc Magnetron Sputtering Two-step Method Annealing
学科领域Materials Science, Ceramics
资助者National Natural Science Foundation of China [51271191, 51571205, 51401209]
收录类别SCI
语种英语
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/78107
专题中国科学院金属研究所
通讯作者Li, MS (reprint author), 72 Wenhua Rd, Shenyang 110016, Peoples R China.
推荐引用方式
GB/T 7714
Li, Yueming,Qian, Yuhai,Zhao, Guorui,et al. Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing[J]. CERAMICS INTERNATIONAL,2017,43(8):6622-6625.
APA Li, Yueming,Qian, Yuhai,Zhao, Guorui,Xu, Jingjun,Li, Meishuan,&Li, MS .(2017).Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing.CERAMICS INTERNATIONAL,43(8),6622-6625.
MLA Li, Yueming,et al."Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing".CERAMICS INTERNATIONAL 43.8(2017):6622-6625.
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