Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides

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	Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides
	Han, Kechang; Lin, Guoqiang; Dong, Chuang; Tai, Kaiping; Jiang, Xin; Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
	2017-03-05
发表期刊	JOURNAL OF ALLOYS AND COMPOUNDS
ISSN	0925-8388
卷号	696 页码:572-579
摘要	For deeply understanding on the atomic-scale strengthening mechanism of the IVB transition-metal nitrides, three groups of the IVB transition-metal nitrides TMN (TiN, ZrN, and HfN) films with different nitrogen contents were synthesized on the Si (100) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, compositions, chemical states, residual stress, hardness and elastic modulus of as-deposited films were characterized by field emission scanning electron microscope, X-ray diffraction, X-ray photoelectron spectrometry, and Nanoindenter measurements. The results showed that TMNx films exhibited B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the TMNx films were kept constant at different nitrogen contents. Both nanohardness and elastic modulus first increased and then decreased with the increase of nitrogen content, reaching the peak at x around 0.82. The composition dependent hardness enhancement may be attributed to different atomic-scale chemical bonding states and electronic structures in this work, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress. (C) 2016 Elsevier B.V. All rights reserved.; For deeply understanding on the atomic-scale strengthening mechanism of the IVB transition-metal nitrides, three groups of the IVB transition-metal nitrides TMN (TiN, ZrN, and HfN) films with different nitrogen contents were synthesized on the Si (100) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, compositions, chemical states, residual stress, hardness and elastic modulus of as-deposited films were characterized by field emission scanning electron microscope, X-ray diffraction, X-ray photoelectron spectrometry, and Nanoindenter measurements. The results showed that TMNx films exhibited B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the TMNx films were kept constant at different nitrogen contents. Both nanohardness and elastic modulus first increased and then decreased with the increase of nitrogen content, reaching the peak at x around 0.82. The composition dependent hardness enhancement may be attributed to different atomic-scale chemical bonding states and electronic structures in this work, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress. (C) 2016 Elsevier B.V. All rights reserved.
部门归属	[han, kechang ; lin, guoqiang ; dong, chuang] dalian univ technol, minist educ, key lab mat modificat laser ion & electron beams, dalian 116024, peoples r china ; [tai, kaiping ; jiang, xin] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Nitride Films Arc Ion Plating Composition Hardness Strengthening Mechanism
学科领域	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
资助者	National Natural Science Foundation of China [51271047]
收录类别	SCI
语种	英语
WOS记录号	WOS:000391819800077
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/78239
专题	中国科学院金属研究所
通讯作者	Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Han, Kechang,Lin, Guoqiang,Dong, Chuang,et al. Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2017,696:572-579.
APA	Han, Kechang,Lin, Guoqiang,Dong, Chuang,Tai, Kaiping,Jiang, Xin,&Lin, GQ .(2017).Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides.JOURNAL OF ALLOYS AND COMPOUNDS,696,572-579.
MLA	Han, Kechang,et al."Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides".JOURNAL OF ALLOYS AND COMPOUNDS 696(2017):572-579.