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一种微互连通孔结构透射电镜样品的制备方法
刘志权,田飞飞,李财富,曹丽华
2016-04-13
Rights Holder刘志权,田飞飞,李财富,曹丽华
Date Available2016-04-13
Country中国
Subtype发明
Abstract一种微互连通孔结构透射电镜样品的制备方法
description.department中国科学院金属研究所
Application Date2013-03-29
Language中文
Application Number201310106068.3
Document Type专利
Identifierhttp://ir.imr.ac.cn/handle/321006/78762
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
刘志权,田飞飞,李财富,曹丽华. 一种微互连通孔结构透射电镜样品的制备方法[P]. 2016-04-13.
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