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Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films
Han, Ke-Chang; Lin, Guo-Qiang; Dong, Chuang; Tai, Kai-Ping; Jiang, Xin; Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
2017-11-01
Source PublicationCHINESE ACAD SCIENCES, INST METAL RESEARCH
ISSN1006-7191
Volume30Issue:11Pages:1100-1108
AbstractTo study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.; To study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
description.department[han, ke-chang ; lin, guo-qiang ; dong, chuang] dalian univ technol, minist educ, key lab mat modificat laser ion & electron beams, dalian 116024, peoples r china ; [tai, kai-ping ; jiang, xin] chinese acad sci, inst met res, shenyang 110016, liaoning, peoples r china
KeywordZrnx Films Nitrogen Vacancy Hardness Electrical Properties Band Structure
Subject AreaMetallurgy & Metallurgical Engineering
Funding OrganizationNational Natural Science Foundation of China [51271047]
Indexed BySCI
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/79014
Collection中国科学院金属研究所
Corresponding AuthorLin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
Recommended Citation
GB/T 7714
Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,et al. Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films[J]. CHINESE ACAD SCIENCES, INST METAL RESEARCH,2017,30(11):1100-1108.
APA Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,Tai, Kai-Ping,Jiang, Xin,&Lin, GQ .(2017).Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films.CHINESE ACAD SCIENCES, INST METAL RESEARCH,30(11),1100-1108.
MLA Han, Ke-Chang,et al."Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films".CHINESE ACAD SCIENCES, INST METAL RESEARCH 30.11(2017):1100-1108.
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