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Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions
Li, YM; Zhao, GR; Qian, YH; Xu, JJ; Li, MS; Li, MS (reprint author), Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Liaoning, Peoples R China.
2018-03-01
发表期刊JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN1005-0302
卷号34期号:3页码:466-471
摘要Polycrystalline Cr2AlC coatings were prepared on M38G superalloy using a two-step method consisting of magnetron sputtering from Cr-Al-C composite targets at room temperature and subsequent annealing at 620 degrees C. Particularly, various targets synthesized by hot pressing mixture of Cr, Al, and C powders at 650-1000 degrees C were used. It was found that regardless of the phase compositions and density of the composite targets, when the molar ratio of Cr:Al:C in the starting materials was 2:1:1, phase-pure crystalline Cr2AlC coatings were prepared by magnetron sputtering and post crystallization. The Cr2AlC coatings were dense and crack-free and had a duplex structure. The adhesion strength of the coating deposited on M38G superalloy from the 800 degrees C hot-pressed target and then annealed at 620 degrees C for 20 h in Ar exceeded 82 + 6 MPa, while its hardness was 12 +/- 3 GPa. (C) 2017 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.; Polycrystalline Cr2AlC coatings were prepared on M38G superalloy using a two-step method consisting of magnetron sputtering from Cr-Al-C composite targets at room temperature and subsequent annealing at 620 degrees C. Particularly, various targets synthesized by hot pressing mixture of Cr, Al, and C powders at 650-1000 degrees C were used. It was found that regardless of the phase compositions and density of the composite targets, when the molar ratio of Cr:Al:C in the starting materials was 2:1:1, phase-pure crystalline Cr2AlC coatings were prepared by magnetron sputtering and post crystallization. The Cr2AlC coatings were dense and crack-free and had a duplex structure. The adhesion strength of the coating deposited on M38G superalloy from the 800 degrees C hot-pressed target and then annealed at 620 degrees C for 20 h in Ar exceeded 82 + 6 MPa, while its hardness was 12 +/- 3 GPa. (C) 2017 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
部门归属[li, yueming ; zhao, guorui ; qian, yuhai ; xu, jingjun ; li, meishuan] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, liaoning, peoples r china ; [li, yueming ; zhao, guorui] univ chinese acad sci, beijing 100039, peoples r china
关键词Thin-films Oxygen Incorporation m(n+1)Ax(n) Phases Elastic Properties Oxidation Microstructure Temperature Ti3sic2 Growth Crystallization
学科领域Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
资助者National Natural Science Foundation of China [51271191, 51571205, 51401209]
收录类别SCI
语种英语
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/79447
专题中国科学院金属研究所
通讯作者Li, MS (reprint author), Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Liaoning, Peoples R China.
推荐引用方式
GB/T 7714
Li, YM,Zhao, GR,Qian, YH,et al. Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2018,34(3):466-471.
APA Li, YM,Zhao, GR,Qian, YH,Xu, JJ,Li, MS,&Li, MS .(2018).Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,34(3),466-471.
MLA Li, YM,et al."Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 34.3(2018):466-471.
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