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Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)
Guo, XT; Niu, YS; Chen, MH; Sun, WY; Zhu, SL; Wang, FH; Chen, MH (reprint author), Northeastern Univ, Minist Educ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Liaoning, Peoples R China.; Niu, YS (reprint author), Chinese Acad Sci, Inst Met Res, Lab Corros & Protect, Shenyang 110016, Liaoning, Peoples R China.
2018
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume427Pages:1071-1079
AbstractThick Ta(N) coating of 51 mu m has been successfully obtained by DCMS technology. Ta(N) is a kind of distorted Ta matrix, which is inter-soluble with N-defect lattice structure, forming the disabled bcc structure. From the XRD and XPS investigations, the composition of Ta(N) coating is consisted of bcc-Ta and bcc-TaN0.06, while that of Ta coating mainly contains beta-Ta phase. It can be concluded from wear test, nanoindentation test and SEM observations, wear resistance of Ta(N) coating is much better than that of Ta coating, due to its high hardness, H/E, H-3/E-2 value and low COF value. The wear mechanism of Ta coating is the compound fatigue and abrasive wear, while that of Ta(N) coating is transformed into adhesive wear mechanism. The secondary adhesion of the plastic deformation for the Ta(N) coating can reinforce the coated surface, to improve the load-bearing and anti-wear capacities, and thus improve the wear resistance. (C) 2017 Elsevier B.V. All rights reserved.; Thick Ta(N) coating of 51 mu m has been successfully obtained by DCMS technology. Ta(N) is a kind of distorted Ta matrix, which is inter-soluble with N-defect lattice structure, forming the disabled bcc structure. From the XRD and XPS investigations, the composition of Ta(N) coating is consisted of bcc-Ta and bcc-TaN0.06, while that of Ta coating mainly contains beta-Ta phase. It can be concluded from wear test, nanoindentation test and SEM observations, wear resistance of Ta(N) coating is much better than that of Ta coating, due to its high hardness, H/E, H-3/E-2 value and low COF value. The wear mechanism of Ta coating is the compound fatigue and abrasive wear, while that of Ta(N) coating is transformed into adhesive wear mechanism. The secondary adhesion of the plastic deformation for the Ta(N) coating can reinforce the coated surface, to improve the load-bearing and anti-wear capacities, and thus improve the wear resistance. (C) 2017 Elsevier B.V. All rights reserved.
description.department[guo, xiaotong ; chen, minghui ; wang, fuhui] northeastern univ, minist educ, sch mat sci & engn, key lab anisotropy & texture mat, shenyang 110819, liaoning, peoples r china ; [niu, yunsong ; sun, wenyao ; zhu, shenglong] chinese acad sci, inst met res, lab corros & protect, shenyang 110016, liaoning, peoples r china
KeywordMechanical-properties Low-energy Films Tantalum Wear Microstructure Nitrogen Power Tan Environments
Subject AreaChemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
Funding OrganizationNational Natural Science Foundation of China [51671053, 51701223]; Youth Innovation Promotion Association CAS [2016178]; Fundamental Research Funds for the Central Universities [N160205001]
Indexed BySCI
Language英语
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/79625
Collection中国科学院金属研究所
Corresponding AuthorChen, MH (reprint author), Northeastern Univ, Minist Educ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Liaoning, Peoples R China.; Niu, YS (reprint author), Chinese Acad Sci, Inst Met Res, Lab Corros & Protect, Shenyang 110016, Liaoning, Peoples R China.
Recommended Citation
GB/T 7714
Guo, XT,Niu, YS,Chen, MH,et al. Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)[J]. APPLIED SURFACE SCIENCE,2018,427:1071-1079.
APA Guo, XT.,Niu, YS.,Chen, MH.,Sun, WY.,Zhu, SL.,...&Niu, YS .(2018).Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS).APPLIED SURFACE SCIENCE,427,1071-1079.
MLA Guo, XT,et al."Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)".APPLIED SURFACE SCIENCE 427(2018):1071-1079.
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