| 一种大面积热丝CVD金刚石薄膜生长装置 | |
| 姜辛; 刘鲁生; 黄楠 | |
| 2018-06-29 | |
| Rights Holder | 中国科学院金属研究所 |
| Subtype | 实用新型 |
| Patent Number | 201721623900.7 |
| Document Type | 专利 |
| Identifier | http://ir.imr.ac.cn/handle/321006/80023 |
| Collection | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | 姜辛,刘鲁生,黄楠. 一种大面积热丝CVD金刚石薄膜生长装置. 201721623900.7[P]. 2018-06-29. |
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