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Water-assisted rapid growth of monolayer graphene films on SiO2/Si substrates
Wei, Shijing; Ma, Lai-Peng; Chen, Mao-Lin; Liu, Zhibo; Ma, Wei; Sun, Dong-Ming; Cheng, Hui-Ming; Ren, Wencai
2019-07-01
Source PublicationCARBON
ISSN0008-6223
Volume148Pages:241-248
AbstractMetal-free growth of high-quality monolayer graphene films by chemical vapor deposition (CVD) on dielectric substrates is of great significance for the development of high-performance graphene-based electronic and optoelectronic devices. However, the existing CVD processes suffer from poor structural uniformity (or growth quality) and/or a slow growth rate due to the negligible catalytic activity of dielectric substrates. Here, we report a water-assisted CVD process for rapid growth of monolayer graphene film on SiO2/Si substrate without using metal catalysts or ultra-high temperature. Even trace amount of water enables the preferential formation of monolayer graphene films with significantly reduced structural defects. Particularly, this strategy enables the rapid growth of monolayer graphene by effectively lowering the growth kinetic barrier. We attribute the benefits of water on simultaneously improving the structural uniformity and growth rate to its mild oxidative effect and the role in accelerating the release of oxygen from the SiO2/Si substrate, respectively. Our work provides helpful information for efficient and controllable CVD growth of high-quality graphene on dielectric substrates. (C) 2019 Elsevier Ltd. All rights reserved.
Indexed BySCI
Language英语
WOS IDWOS:000468421900026
PublisherPERGAMON-ELSEVIER SCIENCE LTD
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/80959
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Wei, Shijing,Ma, Lai-Peng,Chen, Mao-Lin,et al. Water-assisted rapid growth of monolayer graphene films on SiO2/Si substrates[J]. CARBON,2019,148:241-248.
APA Wei, Shijing.,Ma, Lai-Peng.,Chen, Mao-Lin.,Liu, Zhibo.,Ma, Wei.,...&Ren, Wencai.(2019).Water-assisted rapid growth of monolayer graphene films on SiO2/Si substrates.CARBON,148,241-248.
MLA Wei, Shijing,et al."Water-assisted rapid growth of monolayer graphene films on SiO2/Si substrates".CARBON 148(2019):241-248.
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