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Influence of modulation period on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering
Liu, Yanming; Shi, Wenbo; Tian, Li; Li, Tong; Wang, Chen; Liu, Feng; Pei, Zhiliang; Fan, Di
2019-06-05
Source PublicationJOURNAL OF ALLOYS AND COMPOUNDS
ISSN0925-8388
Volume788Pages:729-738
AbstractWB2/CrN multilayer films with thick modulation periods over 50 nm (Lambda = 1400, 315, 235, 150, 55 nm) were synthesized by direct-current magnetron sputtering, and the influence of modulation period on microstructure and mechanical properties for the multilayer films was systematically studied. In WB2/CrN multilayer films, CrN sublayers present the columnar microstructure. As L decreases, the structure of WB2 sublayers evolves from (110) orientation to (001) orientation to amorphous structure, and critical crystalline thickness for WB2 sublayers is over 150 nm here. A transition layer, which shows the columnar crystal with size of 10-11 nm high and 2.5-3.5 nm wide caused by the effect of the crystalline interface of the CrN sublayers, is detected in WB2 sublayers. Additionally, a-BN, WB2, WB2(N), CrN, Cr2N and Cr2O3 phase are formed in the multilayer films. Moreover, film hardness mainly obeys the rule of mixture. The maximum hardness of 31.2 GPa is obtained at Lambda = 315 nm due to crystalline WB2 sublayers with (001) preferred orientation, and amorphous WB2 sublayers greatly reduce the film hardness to only 22.3-24.3 GPa at Lambda < 235 nm. Consequently, the poor hardness leads to the higher wear rates (5.7-7.8 x 10(-7) mm(3)/mN) of multilayer films with Lambda <= 235 nm compared with those (2.9-3.3 x 10(-7) mm(3)/mN) of other films. However, both the fracture toughness and adhesive strength of the films present an increasing trend with decreasing Lambda, resulting from the soft CrN and BN phases and a certain amount of interface. In conclusion, decreasing the critical crystal-thickness of the WB2 sublayers, controlling the N content in WB2 sublayers and getting sharp interfaces will play important roles in developing the higher-performance WB2/CrN multilayer films. (C) 2019 Elsevier B.V. All rights reserved.
KeywordMagnetron sputtering WB2/CrN multilayers Thick modulation period Mechanical properties
Indexed BySCI
Language英语
WOS IDWOS:000462767000086
PublisherELSEVIER SCIENCE SA
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81015
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Liu, Yanming,Shi, Wenbo,Tian, Li,et al. Influence of modulation period on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2019,788:729-738.
APA Liu, Yanming.,Shi, Wenbo.,Tian, Li.,Li, Tong.,Wang, Chen.,...&Fan, Di.(2019).Influence of modulation period on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering.JOURNAL OF ALLOYS AND COMPOUNDS,788,729-738.
MLA Liu, Yanming,et al."Influence of modulation period on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering".JOURNAL OF ALLOYS AND COMPOUNDS 788(2019):729-738.
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