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A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route
Meng, Lijian; Wang, Zhenhua; Yang, Liang; Ren, Weijun; Liu, Wei; Zhang, Zhidong; Yang, Tao; dos Santos, M. P.
2019-04-30
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume474Pages:211-217
AbstractFe-doped TiO2 thin films are deposited both on the (100) oriented Si and glass substrates by pulsed laser deposition technique using Fe powder doped TiO2 ceramic target. The structural and optical properties of the film have been studied in detail. The degree of film crystallinity is investigated by X-ray diffraction and confirmed by Raman scattering measurements. The stoichiometry and chemical states of Fe, Ti and O are probed by X-ray photoelectron spectroscopy. The surface morphologies are observed by Scanning electron microscopy. The optical properties are studied by measuring the transmittance and the optical constants, the refractive index and the extinction coefficient. It is found that the substrate temperature is a key factor in determining the thin film structure which further influences the refractive index and the optical band gap of the film. An anatase structure emerges above 300 degrees C while the rutile structure appears when the substrate temperature is higher than 500 degrees C. Another result is that Fe exists in the deposited films as Fe3+ and the atomic concentration of Fe in the films is much lower than that in the source target. (C) 2018 Elsevier B. V. All rights reserved.
KeywordFe-doped TiO2 Structural properties Optical properties PLD Thin Film
Indexed BySCI
Language英语
WOS IDWOS:000458478700027
PublisherELSEVIER SCIENCE BV
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81161
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Meng, Lijian,Wang, Zhenhua,Yang, Liang,et al. A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route[J]. APPLIED SURFACE SCIENCE,2019,474:211-217.
APA Meng, Lijian.,Wang, Zhenhua.,Yang, Liang.,Ren, Weijun.,Liu, Wei.,...&dos Santos, M. P..(2019).A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route.APPLIED SURFACE SCIENCE,474,211-217.
MLA Meng, Lijian,et al."A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route".APPLIED SURFACE SCIENCE 474(2019):211-217.
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