Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition

doi:10.1116/1.1761071

IMR OpenIR

	Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition
	Lin, GQ ; Zhao, YH ; Guo, HM ; Wang, DZ ; Dong, C ; Huang, RF ; Wen, LS
通讯作者	Dong, C()
	2004-07-01
发表期刊	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
ISSN	0734-2101
卷号	22 期号:4 页码:1218-1222
摘要	TiN films on stainless steel have been synthesized by arc deposition with dc and pulsed biases. We show that at the same bias (-300 V), coarse particles on the film surface are significantly decreased both in size and in amount, if the bias is pulsed. In order to clarify the related process, we have analyzed, using orthogonal design, the influences from different working parameters. We show that the parameters related to the pulsed bias such as magnitude and duty cycle have important effects on the size distribution of the particles. According to our theoretical calculations based on plasma sheath and dust plasma theories, the origin of the droplet elimination lies in enhanced repulsion of the negatively charged droplets in pulsed plasma. (C) 2004 American Vacuum Society.
DOI	10.1116/1.1761071
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Coatings & Films ; Physics, Applied
WOS记录号	WOS:000223322000024
出版者	A V S AMER INST PHYSICS
引用统计	被引频次：41[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/81255
专题	中国科学院金属研究所
通讯作者	Dong, C
作者单位	1.Dalian Univ Technol, State Key Lab Mat Modificat, Dalian 116024, Peoples R China 2.Chinese Acad Sci, Met Res Inst, Shenyang 110000, Peoples R China
推荐引用方式 GB/T 7714	Lin, GQ,Zhao, YH,Guo, HM,et al. Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2004,22(4):1218-1222.
APA	Lin, GQ.,Zhao, YH.,Guo, HM.,Wang, DZ.,Dong, C.,...&Wen, LS.(2004).Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,22(4),1218-1222.
MLA	Lin, GQ,et al."Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 22.4(2004):1218-1222.