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The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure
Song, Gui-hong; Liu, Qian-Nan; Du, Hao; Hu, Fang; Wang, Chao; He, Chun-lin
2019-02-15
Source PublicationSURFACE & COATINGS TECHNOLOGY
ISSN0257-8972
Volume359Pages:252-257
AbstractThe Mg-2(Si,Sn) solid solutions films have been deposited on single crystalline Si(111) substrates under temperatures from 130 to 400 degrees C by magnetron sputtering using a Mg-Si-Sn alloy target. The phase components, microstructures and the thermoelectric properties of these films were investigated. It is indicated that the films deposited under lower temperature ( <= 300 degrees C) possess a cubic anti-fluorite structure phase and their structures transform into orthorhombic and hexagonal with the increasing temperature to 400 degrees C. Meanwhile, the tetragonal structure metal Sn phase occurs on samples deposited under temperatures of 350 degrees C and 400 degrees C. Furthermore, the film deposited under 350 degrees C is composed of cubic anti-fluorite structure and orthorhombic structure phase, and possesses the highest absolute value of Seebeck coefficient and the highest electrical resistivity. On the other hand, the film deposited under 130 degrees C which is composed of only cubic anti-fluorite structure possesses the highest power factor at all measured temperature due to higher absolute value of Seebeck coefficient and lower electrical resistivity. It is suggested that the Mg-2(Si,Sn) solid solutions film with cubic phase structure has higher power factor than that with orthorhombic and hexagonal phase structure.
KeywordMg-Sn-Si film Thermoelectric property Seebeck coefficient Cubic phase Magnetron sputtering
Indexed BySCI
Language英语
WOS IDWOS:000457662700031
PublisherELSEVIER SCIENCE SA
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81363
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Song, Gui-hong,Liu, Qian-Nan,Du, Hao,et al. The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure[J]. SURFACE & COATINGS TECHNOLOGY,2019,359:252-257.
APA Song, Gui-hong,Liu, Qian-Nan,Du, Hao,Hu, Fang,Wang, Chao,&He, Chun-lin.(2019).The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure.SURFACE & COATINGS TECHNOLOGY,359,252-257.
MLA Song, Gui-hong,et al."The thermoelectric properties of the Mg-2(Sn,Si) films by magnetron sputtering with different microstructure".SURFACE & COATINGS TECHNOLOGY 359(2019):252-257.
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