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Analysis for system errors in measuring the sidewall angle of a silica waveguide with confocal laser scanning microscope (CLSM)
Shang, Hongpeng; Sun, DeGui; Yu, Peng; Sun, Qingyu; Gao, Jinzhu; Hall, Trevor J.
2019-02-01
Source PublicationMEASUREMENT SCIENCE AND TECHNOLOGY
ISSN0957-0233
Volume30Issue:2
AbstractThis article reports on the limitation analyses for the sidewall angle (SWA) measurements of microstructures with a confocal laser scanning microscope (CLSM). Under the resolutions of three-dimensional imaging process of CLSM and its spatial frequency spectrum distribution, the optical phase signal of an object is studied to model the signal-noise-ratio (SNR) performance of measurements and the point spread function theory is applied to discuss the limitation to the measurement accuracy of SWA. Then, the characteristics of both the relative SNR performance and the measurement accuracy are numerically simulated with these two theoretical models. As a result, two important characteristics of CLSM measurements for SWA are found as that the relative SNR is quickly decreasing with SWA; the intrinsic measurement error linearly decreases with SWA. Furthermore, for a fabricated device sample having the waveguide dimension of 6 x 10 mu m(2), with a scanning section of 10nm and a detector aperture of PH = 0.3 Airy Unit, a CLSM image of 300 x 300 mu m(2) is acquired and reconstructed, in which 10 waveguide channels is covered. For a selected channel, based on ten measurements the averaged values of the left and right SWAs are 85.68 degrees +/- 0.32 degrees and 86.59 degrees +/- 0.24 degrees, respectively, after being compensated with the intrinsic measurement errors. Finally, the distribution and uniformity of SWA values among the ten waveguide channels in the image arc analyzed.
Keywordlaser confocal scanning microscope sidewall angle measurement image acquiring/retrieving signal noise ratio intrinsic measurement error
Indexed BySCI
Language英语
WOS IDWOS:000455146900001
PublisherIOP PUBLISHING LTD
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81417
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Shang, Hongpeng,Sun, DeGui,Yu, Peng,et al. Analysis for system errors in measuring the sidewall angle of a silica waveguide with confocal laser scanning microscope (CLSM)[J]. MEASUREMENT SCIENCE AND TECHNOLOGY,2019,30(2).
APA Shang, Hongpeng,Sun, DeGui,Yu, Peng,Sun, Qingyu,Gao, Jinzhu,&Hall, Trevor J..(2019).Analysis for system errors in measuring the sidewall angle of a silica waveguide with confocal laser scanning microscope (CLSM).MEASUREMENT SCIENCE AND TECHNOLOGY,30(2).
MLA Shang, Hongpeng,et al."Analysis for system errors in measuring the sidewall angle of a silica waveguide with confocal laser scanning microscope (CLSM)".MEASUREMENT SCIENCE AND TECHNOLOGY 30.2(2019).
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