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一种在工件内孔沉积金刚石薄膜的热丝化学气相沉积装置
姜辛; 刘鲁生; 黄楠; 杨兵; 翟超峰; 李俊豪; 贾心怡
2017-02-15
Rights Holder中国科学院金属研究所
Subtype实用新型
Patent Number201620932071.X
Document Type专利
Identifierhttp://ir.imr.ac.cn/handle/321006/81713
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
姜辛,刘鲁生,黄楠,等. 一种在工件内孔沉积金刚石薄膜的热丝化学气相沉积装置. 201620932071.X[P]. 2017-02-15.
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