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Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition
Lin, GQ; Zhao, YH; Guo, HM; Wang, DZ; Dong, C; Huang, RF; Wen, LS
Corresponding AuthorDong, C()
2004-07-01
Source PublicationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
ISSN0734-2101
Volume22Issue:4Pages:1218-1222
AbstractTiN films on stainless steel have been synthesized by arc deposition with dc and pulsed biases. We show that at the same bias (-300 V), coarse particles on the film surface are significantly decreased both in size and in amount, if the bias is pulsed. In order to clarify the related process, we have analyzed, using orthogonal design, the influences from different working parameters. We show that the parameters related to the pulsed bias such as magnitude and duty cycle have important effects on the size distribution of the particles. According to our theoretical calculations based on plasma sheath and dust plasma theories, the origin of the droplet elimination lies in enhanced repulsion of the negatively charged droplets in pulsed plasma. (C) 2004 American Vacuum Society.
DOI10.1116/1.1761071
Indexed BySCI
Language英语
WOS Research AreaMaterials Science ; Physics
WOS SubjectMaterials Science, Coatings & Films ; Physics, Applied
WOS IDWOS:000223322000024
PublisherA V S AMER INST PHYSICS
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81950
Corresponding AuthorDong, C
Affiliation1.Dalian Univ Technol, State Key Lab Mat Modificat, Dalian 116024, Peoples R China
2.Chinese Acad Sci, Met Res Inst, Shenyang 110000, Peoples R China
Recommended Citation
GB/T 7714
Lin, GQ,Zhao, YH,Guo, HM,et al. Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2004,22(4):1218-1222.
APA Lin, GQ.,Zhao, YH.,Guo, HM.,Wang, DZ.,Dong, C.,...&Wen, LS.(2004).Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,22(4),1218-1222.
MLA Lin, GQ,et al."Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 22.4(2004):1218-1222.
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