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Measurement of atomic oxygen density by a Ni catalytic probe
Duo, S; Li, M
Corresponding AuthorDuo, S(swduo@imr.ac.cn)
2004-08-01
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume40Issue:8Pages:791-794
AbstractA Ni catalytic probe was used to determine the density of oxygen atoms in a groundbased atomic oxygen simulation facility. The atomic oxygen (AO) source is a low oxygen pressure ionized inductively coupled microwave ECR plasma. A virgin nickel disk was exposed to atomic oxygen environment for 30 min for full activation to form a layer NiO. After successful activation, the temperature of the nickel probe during exposures to atomic oxygen was measured at different experimental conditions. The density of atomic oxygen is studied as a function of oxygen pressure and axis position of the catalytic probe in the vacuum chamber. It was found that the density of AO varies from similar to3x 10(16) to 2x 10(17) atom/m(3) as the plasma pressure was varied from 10(-3)-10(-2) Pa. The density of AO measured by erosion of Kapton is in good agreement with results obtained from the nickel catalytic probe.
Keywordatomic oxygen (AO) nickel probe AO density
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000223695400002
PublisherSCIENCE CHINA PRESS
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/81953
Corresponding AuthorDuo, S
AffiliationChinese Acad Sci, Met Res Inst, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Duo, S,Li, M. Measurement of atomic oxygen density by a Ni catalytic probe[J]. ACTA METALLURGICA SINICA,2004,40(8):791-794.
APA Duo, S,&Li, M.(2004).Measurement of atomic oxygen density by a Ni catalytic probe.ACTA METALLURGICA SINICA,40(8),791-794.
MLA Duo, S,et al."Measurement of atomic oxygen density by a Ni catalytic probe".ACTA METALLURGICA SINICA 40.8(2004):791-794.
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