一种用于高温气氛环境下粉体材料制备的化学气相沉积反应装置

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	一种用于高温气氛环境下粉体材料制备的化学气相沉积反应装置
	任文才; 马超群; 成会明
	2018-09-28
Rights Holder	中国科学院金属研究所
Subtype	实用新型
Patent Number	201721718685.9
Document Type	专利
Identifier	http://ir.imr.ac.cn/handle/321006/81992
Collection	中国科学院金属研究所
Recommended Citation GB/T 7714	任文才,马超群,成会明. 一种用于高温气氛环境下粉体材料制备的化学气相沉积反应装置. 201721718685.9[P]. 2018-09-28.

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