IMR OpenIR
沉积工艺参数对电弧离子镀...
赵彦辉; 史文博; 刘忠海; ...
2020
Source Publication真空与低温
Volume26Issue:05Pages:385-391
Abstract阴极电弧离子镀技术作为工...
Keyword电弧离子镀 沉积速率 ...
MOST Discipline CatalogueTG174.4
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/82167
Collection中国科学院金属研究所
Affiliation中国科学院金属研究所材料...
First Author AffilicationInstitute of Metal Research Chinese Academy of Sciences
Recommended Citation
GB/T 7714
赵彦辉,史文博,刘忠海,等. 沉积工艺参数对电弧离子镀...[J]. 真空与低温,2020,26(05):385-391.
APA 赵彦辉,史文博,刘忠海,&....(2020).沉积工艺参数对电弧离子镀....真空与低温,26(05),385-391.
MLA 赵彦辉,et al."沉积工艺参数对电弧离子镀...".真空与低温 26.05(2020):385-391.
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