Knowledge Management System Of Institute of metal research,CAS
沉积工艺参数对电弧离子镀... | |
赵彦辉; 史文博; 刘忠海; ... | |
2020 | |
Source Publication | 真空与低温
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Volume | 26Issue:05Pages:385-391 |
Abstract | 阴极电弧离子镀技术作为工... |
Keyword | 电弧离子镀 沉积速率 ... |
MOST Discipline Catalogue | TG174.4 |
Document Type | 期刊论文 |
Identifier | http://ir.imr.ac.cn/handle/321006/82167 |
Collection | 中国科学院金属研究所 |
Affiliation | 中国科学院金属研究所材料... |
First Author Affilication | Institute of Metal Research Chinese Academy of Sciences |
Recommended Citation GB/T 7714 | 赵彦辉,史文博,刘忠海,等. 沉积工艺参数对电弧离子镀...[J]. 真空与低温,2020,26(05):385-391. |
APA | 赵彦辉,史文博,刘忠海,&....(2020).沉积工艺参数对电弧离子镀....真空与低温,26(05),385-391. |
MLA | 赵彦辉,et al."沉积工艺参数对电弧离子镀...".真空与低温 26.05(2020):385-391. |
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