| Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating | |
| Zou, YS; Wang, QM; Du, H; Song, GH; Xiao, JQ; Gong, J; Sun, C; Wen, LS | |
| Corresponding Author | Zou, YS(yshzou@imr.ac.cn) |
| 2005-03-15 | |
| Source Publication | APPLIED SURFACE SCIENCE
 |
| ISSN | 0169-4332 |
| Volume | 241Issue:3-4Pages:295-302 |
| Abstract | Nitrogen doped diamond-like carbon films were deposited on Si (1 0 0) substrates by arc ion plating (AIP) technique under different N-2 volume percentage in the gas mixture of Ar and N-2. The deposited films were characterized by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Raman spectra indicate that the I-D/I-G ratio increases with increasing the N-2 volume percentage. XPS analysis shows a strong influence of the N-2 volume percentage on the N atom concentration and the chemical bonding states in the deposited films. Nitrogen content of the deposited films increased with the increasing of N-2 volume percentage. The maximum N concentration and N/C atomic ratio are up to 12.7 at.% and 0.162 at the 90 vol.% N-2, respectively. From decomposition of XPS C 1s peaks, it shows that the nitrogen doped diamond-like carbon films consist of amorphous carbon-carbon bonding ((SPC)-C-2-C and sp(3)C-C), N atoms bonded to sp(3)-hybridized C atoms (sp(3)C-N) and N atoms bonded to sp(2)-hybridized C atoms (sp(2)C-N). The total content of sp(3) bonding decreases with increasing N-2 volume percentage. XPS N Is spectra show that there exist the N-sp(2)C and N-sp(3)C bonding in the deposited nitrogen doped diamond-like carbon films. As the N-2 volume percentage increases, the N-sP(3)C bonding content increases, but the N-(SPC)-C-2 bonding content decreases. (C) 2004 Elsevier B.V. All rights reserved. |
| Keyword | nitrogen doped diamond-like carbon arc ion plating X-ray photoelectron spectroscopy microstructure bonding structure |
| DOI | 10.1016/j.apsusc.2004.07.043 |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Chemistry ; Materials Science ; Physics |
| WOS Subject | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| WOS ID | WOS:000227536800004 |
| Publisher | ELSEVIER SCIENCE BV |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/82291 |
| Corresponding Author | Zou, YS |
| Affiliation | 1.Chinese Acad Sci, Met Res Inst, Div Surface Engn Mat, Shenyang 110016, Peoples R China 2.Shengyang Univ Technol, Shenyang 110023, Peoples R China |
| Recommended Citation GB/T 7714 | Zou, YS,Wang, QM,Du, H,et al. Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating[J]. APPLIED SURFACE SCIENCE,2005,241(3-4):295-302. |
| APA | Zou, YS.,Wang, QM.,Du, H.,Song, GH.,Xiao, JQ.,...&Wen, LS.(2005).Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating.APPLIED SURFACE SCIENCE,241(3-4),295-302. |
| MLA | Zou, YS,et al."Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating".APPLIED SURFACE SCIENCE 241.3-4(2005):295-302. |
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