Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating

doi:10.1016/j.apsusc.2004.07.043

IMR OpenIR

	Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating
	Zou, YS ; Wang, QM ; Du, H ; Song, GH ; Xiao, JQ ; Gong, J ; Sun, C ; Wen, LS
通讯作者	Zou, YS(yshzou@imr.ac.cn)
	2005-03-15
发表期刊	APPLIED SURFACE SCIENCE
ISSN	0169-4332
卷号	241 期号:3-4 页码:295-302
摘要	Nitrogen doped diamond-like carbon films were deposited on Si (1 0 0) substrates by arc ion plating (AIP) technique under different N-2 volume percentage in the gas mixture of Ar and N-2. The deposited films were characterized by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Raman spectra indicate that the I-D/I-G ratio increases with increasing the N-2 volume percentage. XPS analysis shows a strong influence of the N-2 volume percentage on the N atom concentration and the chemical bonding states in the deposited films. Nitrogen content of the deposited films increased with the increasing of N-2 volume percentage. The maximum N concentration and N/C atomic ratio are up to 12.7 at.% and 0.162 at the 90 vol.% N-2, respectively. From decomposition of XPS C 1s peaks, it shows that the nitrogen doped diamond-like carbon films consist of amorphous carbon-carbon bonding ((SPC)-C-2-C and sp(3)C-C), N atoms bonded to sp(3)-hybridized C atoms (sp(3)C-N) and N atoms bonded to sp(2)-hybridized C atoms (sp(2)C-N). The total content of sp(3) bonding decreases with increasing N-2 volume percentage. XPS N Is spectra show that there exist the N-sp(2)C and N-sp(3)C bonding in the deposited nitrogen doped diamond-like carbon films. As the N-2 volume percentage increases, the N-sP(3)C bonding content increases, but the N-(SPC)-C-2 bonding content decreases. (C) 2004 Elsevier B.V. All rights reserved.
关键词	nitrogen doped diamond-like carbon arc ion plating X-ray photoelectron spectroscopy microstructure bonding structure
DOI	10.1016/j.apsusc.2004.07.043
收录类别	SCI
语种	英语
WOS研究方向	Chemistry ; Materials Science ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000227536800004
出版者	ELSEVIER SCIENCE BV
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/82291
通讯作者	Zou, YS
作者单位	1.Chinese Acad Sci, Met Res Inst, Div Surface Engn Mat, Shenyang 110016, Peoples R China 2.Shengyang Univ Technol, Shenyang 110023, Peoples R China
推荐引用方式 GB/T 7714	Zou, YS,Wang, QM,Du, H,et al. Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating[J]. APPLIED SURFACE SCIENCE,2005,241(3-4):295-302.
APA	Zou, YS.,Wang, QM.,Du, H.,Song, GH.,Xiao, JQ.,...&Wen, LS.(2005).Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating.APPLIED SURFACE SCIENCE,241(3-4),295-302.
MLA	Zou, YS,et al."Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating".APPLIED SURFACE SCIENCE 241.3-4(2005):295-302.