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Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating
Zou, YS; Wang, QM; Du, H; Song, GH; Xiao, JQ; Gong, J; Sun, C; Wen, LS
Corresponding AuthorZou, YS(yshzou@imr.ac.cn)
2005-03-15
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume241Issue:3-4Pages:295-302
AbstractNitrogen doped diamond-like carbon films were deposited on Si (1 0 0) substrates by arc ion plating (AIP) technique under different N-2 volume percentage in the gas mixture of Ar and N-2. The deposited films were characterized by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Raman spectra indicate that the I-D/I-G ratio increases with increasing the N-2 volume percentage. XPS analysis shows a strong influence of the N-2 volume percentage on the N atom concentration and the chemical bonding states in the deposited films. Nitrogen content of the deposited films increased with the increasing of N-2 volume percentage. The maximum N concentration and N/C atomic ratio are up to 12.7 at.% and 0.162 at the 90 vol.% N-2, respectively. From decomposition of XPS C 1s peaks, it shows that the nitrogen doped diamond-like carbon films consist of amorphous carbon-carbon bonding ((SPC)-C-2-C and sp(3)C-C), N atoms bonded to sp(3)-hybridized C atoms (sp(3)C-N) and N atoms bonded to sp(2)-hybridized C atoms (sp(2)C-N). The total content of sp(3) bonding decreases with increasing N-2 volume percentage. XPS N Is spectra show that there exist the N-sp(2)C and N-sp(3)C bonding in the deposited nitrogen doped diamond-like carbon films. As the N-2 volume percentage increases, the N-sP(3)C bonding content increases, but the N-(SPC)-C-2 bonding content decreases. (C) 2004 Elsevier B.V. All rights reserved.
Keywordnitrogen doped diamond-like carbon arc ion plating X-ray photoelectron spectroscopy microstructure bonding structure
DOI10.1016/j.apsusc.2004.07.043
Indexed BySCI
Language英语
WOS Research AreaChemistry ; Materials Science ; Physics
WOS SubjectChemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000227536800004
PublisherELSEVIER SCIENCE BV
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/82291
Corresponding AuthorZou, YS
Affiliation1.Chinese Acad Sci, Met Res Inst, Div Surface Engn Mat, Shenyang 110016, Peoples R China
2.Shengyang Univ Technol, Shenyang 110023, Peoples R China
Recommended Citation
GB/T 7714
Zou, YS,Wang, QM,Du, H,et al. Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating[J]. APPLIED SURFACE SCIENCE,2005,241(3-4):295-302.
APA Zou, YS.,Wang, QM.,Du, H.,Song, GH.,Xiao, JQ.,...&Wen, LS.(2005).Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating.APPLIED SURFACE SCIENCE,241(3-4),295-302.
MLA Zou, YS,et al."Structural characterization of nitrogen doped diamond-like carbon films deposited by arc ion plating".APPLIED SURFACE SCIENCE 241.3-4(2005):295-302.
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