Numerical analysis of spacial field in hot filament chemical vapor deposition diamond film

IMR OpenIR

	Numerical analysis of spacial field in hot filament chemical vapor deposition diamond film
	Li, JG ; Liu, S ; Li, YY ; Hu, DP ; Ji, XL ; Mei, J ; Zhou, D
通讯作者	Li, JG(jiangli@imr.ac.cn)
	2005-04-11
发表期刊	ACTA METALLURGICA SINICA
ISSN	0412-1961
卷号	41 期号:4 页码:437-443
摘要	Two-dimension coupled model of the temperature filed, velocity field and density field was developed according to the geometry and technology parameters in hot filament chemical vapor deposition (HFCVD) diamond film. The spacial field during large area diamond film deposition was simulated using this model to study the influence of deposited parameters. The calculated results about the temperature and the mass flow density on the substrate are consistent with experimented ones. The inlet gas velocity obviously affects the uniformity of the mass flow density, and the other deposited parameters have little influence on the distributions of the temperature and mass flow density. The optimal hot filament geometry parameters to deposit high quality diamond films with an area of 100 mm x 100 mm are gained on the basis of the minimum temperature along hot filament array.
关键词	HFCVD coupled model spacial field simulation
收录类别	SCI
语种	英语
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000228756900020
出版者	SCIENCE CHINA PRESS
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/82871
专题	中国科学院金属研究所
通讯作者	Li, JG
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 2.China Acad Engn Phys, Inst Struct Mat, Mianyang 621900, Peoples R China
推荐引用方式 GB/T 7714	Li, JG,Liu, S,Li, YY,et al. Numerical analysis of spacial field in hot filament chemical vapor deposition diamond film[J]. ACTA METALLURGICA SINICA,2005,41(4):437-443.
APA	Li, JG.,Liu, S.,Li, YY.,Hu, DP.,Ji, XL.,...&Zhou, D.(2005).Numerical analysis of spacial field in hot filament chemical vapor deposition diamond film.ACTA METALLURGICA SINICA,41(4),437-443.
MLA	Li, JG,et al."Numerical analysis of spacial field in hot filament chemical vapor deposition diamond film".ACTA METALLURGICA SINICA 41.4(2005):437-443.