Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method

doi:10.1016/j.matchar.2005.11.009

IMR OpenIR

	Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method
	Qin, M ; Ju, DY ; Wu, YN ; Sun, C ; Li, JB
通讯作者	Qin, M(mqin2001@yahoo.com)
	2006-04-01
发表期刊	MATERIALS CHARACTERIZATION
ISSN	1044-5803
卷号	56 期号:3 页码:208-213
摘要	A new method is applied to measure the fracture strength of a ceramic film on a substrate by in situ X-ray stress analysis combined with micro-tensile test. As an example, a TiN film was deposited on a steel substrate by multi-arc ion plating (MAIP). During the tensile test, the stresses in the loading and transverse directions of the TiN film were determined by an in situ X-ray stress analysis method, and the applied external strain of the film was measured by a strain gauge. According to the new analytical method described in this paper, the fracture strength of the TiN film can be determined directly, and the value is 7.01 GPa. After comparing the results of another TiN film deposited by plasma-assisted chemical vapor deposition (PACVD), which was previously studied by the authors, with those in this study, the influence of deposition technique on the plastic deformation ability of TiN films is also discussed. (c) 2005 Elsevier Inc. All rights reserved.
关键词	ceramic film fracture strength biaxial stresses X-ray stress analysis
DOI	10.1016/j.matchar.2005.11.009
收录类别	SCI
语种	英语
WOS研究方向	Materials Science
WOS类目	Materials Science, Characterization & Testing
WOS记录号	WOS:000236454600006
出版者	ELSEVIER SCIENCE INC
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/85549
专题	中国科学院金属研究所
通讯作者	Qin, M
作者单位	1.Saitama Inst Technol, High Tech Res Ctr, Okabe, Saitama 3690293, Japan 2.Chinese Acad Sci, Met Res Inst, Dept Surface Engn Mat, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Qin, M,Ju, DY,Wu, YN,et al. Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method[J]. MATERIALS CHARACTERIZATION,2006,56(3):208-213.
APA	Qin, M,Ju, DY,Wu, YN,Sun, C,&Li, JB.(2006).Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method.MATERIALS CHARACTERIZATION,56(3),208-213.
MLA	Qin, M,et al."Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method".MATERIALS CHARACTERIZATION 56.3(2006):208-213.