Transparent conductive ZnO : Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering

doi:10.1016/j.tsf.2005.09.010

IMR OpenIR

	Transparent conductive ZnO : Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering
	Pei, ZL; Zhang, XB; Zhang, GP; Gong, J; Sun, C; Huang, RF; Wen, LS
通讯作者	Wen, LS()
	2006-02-21
发表期刊	THIN SOLID FILMS
ISSN	0040-6090
卷号	497 期号:1-2 页码:20-23
摘要	In this paper, we report different methods to reduce the sheet resistance of ZnO:Al (AZO) films on flexible substrates without degrading the optical transmittance in the visible range. Under proper bias, AZO films deposited on Al2O3-buffered flexible substrates showed a significant decrease of sheet resistance when compared with those deposited on bare polymer. The films with resistivity as low as 8.4 x 10(-4) ohm cm and the optical transmittance about 80% have been obtained by improved methods. By calculating the Al doping efficiency and the mean free path of electrons, ionized impurity scattering was considered to be the dominant factor for the transport mechanism of carriers. (c) 2005 Elsevier B.V. All rights reserved.
关键词	zinc oxide TCO buffer layer sputtering
DOI	10.1016/j.tsf.2005.09.010
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000234957300004
出版者	ELSEVIER SCIENCE SA
引用统计	被引频次：96[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/87073
专题	中国科学院金属研究所
通讯作者	Wen, LS
作者单位	Chinese Acad Sci, Met Res Inst, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Pei, ZL,Zhang, XB,Zhang, GP,et al. Transparent conductive ZnO : Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering[J]. THIN SOLID FILMS,2006,497(1-2):20-23.
APA	Pei, ZL.,Zhang, XB.,Zhang, GP.,Gong, J.,Sun, C.,...&Wen, LS.(2006).Transparent conductive ZnO : Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering.THIN SOLID FILMS,497(1-2),20-23.
MLA	Pei, ZL,et al."Transparent conductive ZnO : Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering".THIN SOLID FILMS 497.1-2(2006):20-23.