Preparation and luminescent property of Al2O3 : Ce thin films by medium frequency react magnetron sputtering

IMR OpenIR

	Preparation and luminescent property of Al2O3 : Ce thin films by medium frequency react magnetron sputtering
	Liao Guojin 1,2; Ba Dechun 1; Wen Lishi 3; Zhu Zhenhua 4; Liu Siming 5
通讯作者	Liao Guojin()
	2008-03-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	37 期号:3 页码:490-494
摘要	Amorphous aluminum oxide thin films doped with cerium were deposited by the MF reactive magnetron sputtering technique. Some Ce3+ appeared in the Al2O3:Ce thin films according to XPS measurement. The photoluminescence emission from these films showed peaks at around 374 which are associated with 5d to 4f transitions of Ce3+ ions. The intensities of the peaks are strongly dependent on the cerium doped concentrations in the films. The presence of cerium as well as the stoichiometry of these films were determined by energy dispersive x-ray spectroscope (EDS) measurements. It is proposed that the light emission generated by luminescent center was associated with trivalence ionic cerium impurities. The crystalline structure of the sample was analysed by X-ray diffractometry (XRD). Auger electron spectroscopy was used to estimate the stoichiometry of the films. This luminescence feature is of significance for display techniques requiring a purer blue emission.
关键词	photo luminescence Al2O3 thin films magnetron sputtering rare earth
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000255088900027
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/94727
专题	中国科学院金属研究所
通讯作者	Liao Guojin
作者单位	1.Northeastern Univ, Fac Mech Engn & Automat, Shenyang 110004, Peoples R China 2.Liaoning Inst Ind, Jinzhou 121001, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 4.Changchun Univ Sci & Technol, Changchun 130022, Peoples R China 5.Beijing Univ Aeronaut & Astronaut, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Liao Guojin,Ba Dechun,Wen Lishi,et al. Preparation and luminescent property of Al2O3 : Ce thin films by medium frequency react magnetron sputtering[J]. RARE METAL MATERIALS AND ENGINEERING,2008,37(3):490-494.
APA	Liao Guojin,Ba Dechun,Wen Lishi,Zhu Zhenhua,&Liu Siming.(2008).Preparation and luminescent property of Al2O3 : Ce thin films by medium frequency react magnetron sputtering.RARE METAL MATERIALS AND ENGINEERING,37(3),490-494.
MLA	Liao Guojin,et al."Preparation and luminescent property of Al2O3 : Ce thin films by medium frequency react magnetron sputtering".RARE METAL MATERIALS AND ENGINEERING 37.3(2008):490-494.