Microlenses fabricated by discontinuous dewetting and soft lithography

doi:10.1016/j.mee.2008.06.001

IMR OpenIR

	Microlenses fabricated by discontinuous dewetting and soft lithography
	Yu, Xinhong; Wang, Zhe; Han, Yanchun
通讯作者	Han, Yanchun(ychan@ciac.jl.cn)
	2008-09-01
发表期刊	MICROELECTRONIC ENGINEERING
ISSN	0167-9317
卷号	85 期号:9 页码:1878-1881
摘要	This letter describes an approach to fabricating microlens arrays with low cost and large area through the combination of discontinuous dewetting and reversible water-ice transition via a soft lithography replica process. Microlenses with different curvature can be tuned by the modulation of the wettability of the substrates. The microlenses fabricated can project clear miniaturized images. (C) 2008 Elsevier B.V. All rights reserved.
关键词	microlens soft lithography
资助者	National Natural Science Foundation of China
DOI	10.1016/j.mee.2008.06.001
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[20621401] ; National Natural Science Foundation of China[50573077] ; National Natural Science Foundation of China[50773080]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Optics ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
WOS记录号	WOS:000259768200005
出版者	ELSEVIER SCIENCE BV
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/95444
专题	中国科学院金属研究所
通讯作者	Han, Yanchun
作者单位	Chinese Acad Sci, Changchun Inst Appl Chem, Grad Sch Chinese Acad Sci, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
推荐引用方式 GB/T 7714	Yu, Xinhong,Wang, Zhe,Han, Yanchun. Microlenses fabricated by discontinuous dewetting and soft lithography[J]. MICROELECTRONIC ENGINEERING,2008,85(9):1878-1881.
APA	Yu, Xinhong,Wang, Zhe,&Han, Yanchun.(2008).Microlenses fabricated by discontinuous dewetting and soft lithography.MICROELECTRONIC ENGINEERING,85(9),1878-1881.
MLA	Yu, Xinhong,et al."Microlenses fabricated by discontinuous dewetting and soft lithography".MICROELECTRONIC ENGINEERING 85.9(2008):1878-1881.