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Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering
Liao Guojin1; Luo Hong2; Yan Shaofeng; Ba Dechun3; Wen Lishi4
Corresponding AuthorLiao Guojin(liaoguojin@163.com)
2009-04-01
Source PublicationRARE METAL MATERIALS AND ENGINEERING
ISSN1002-185X
Volume38Issue:4Pages:700-704
AbstractAluminum oxide films doped with Ce were prepared by the medium frequency reactive magnetron sputtering technique. Ce3+ content, the composition and the crystalline structure of the films were characterized by EDS, XRD and AES. The results show that the photoluminescence emission of these films shows peaks at the range of 374 similar to 405 nm which are associated with 5d to 4f transitions of Ce. The relative intensities of these peaks are strongly dependent on the amount of Ce incorporated in the films, and the substrate temperature during deposition. It is proposed that the light emission observed is generated by the luminescent center associated with cerium chloride molecular rather than the doped cerium ions (Ce3+). With the increase of Ce concentration, the photoluminescence peaks shift to lower energy, it would be associated with the existence of element chrorine in the films.
Keywordphotoluminescence Al2O3 thin films magnetron sputtering CeCl3
Indexed BySCI
Language英语
WOS Research AreaMaterials Science ; Metallurgy & Metallurgical Engineering
WOS SubjectMaterials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS IDWOS:000266079800030
PublisherNORTHWEST INST NONFERROUS METAL RESEARCH
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/96566
Collection中国科学院金属研究所
Corresponding AuthorLiao Guojin
Affiliation1.Liaoning Univ Technol, Sch Mech Engn & Automat, Jinzhou 121001, Peoples R China
2.Petro China NE Refining & Chem Engn Co Ltd, Jinzhou Design Inst, Jinzhou 121001, Peoples R China
3.Northeastern Univ, Shenyang 110004, Peoples R China
4.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Liao Guojin,Luo Hong,Yan Shaofeng,et al. Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38(4):700-704.
APA Liao Guojin,Luo Hong,Yan Shaofeng,Ba Dechun,&Wen Lishi.(2009).Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering.RARE METAL MATERIALS AND ENGINEERING,38(4),700-704.
MLA Liao Guojin,et al."Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering".RARE METAL MATERIALS AND ENGINEERING 38.4(2009):700-704.
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