Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation

IMR OpenIR

	Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation
	Yang Shuichang 1; Liao Zhijun 1; Liu Zhenliang 1; Fan Qiang 1; Wu Dengxue 1; Lu Tiecheng 1,2
通讯作者	Liao Zhijun()
	2009-12-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	38 页码:564-567
摘要	Boron carbide thin films were deposited on Si (100) substrates by using electron beam evaporation. Subsequently, the film samples were characterized by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The surface morphology was analyzed with atomic force microscope (AFM). The results of XRD show that the crystallization of the boron carbide thin films meliorate gradually with increasing substrate temperature and crystalloid of the boron carbide thin films are got at more than 150 degrees C of the substrate temperature. The results of XPS show that the films' surface chemistry component is mostly B(4)C, and the boron carbide thin film's chemistry component and structural characteristic are obtained by XPS. The charts of AFM show that the thin films are compact and smooth, the RMS roughness of the boron carbide thin film rises gradually with increasing substrate temperature.
关键词	electron beam evaporation boron carbide thin films XRD XPS
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000208192600150
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/96961
专题	中国科学院金属研究所
通讯作者	Liao Zhijun
作者单位	1.Sichuan Univ, Minist Educ, Key Lab Radiat Phys & Technol, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
推荐引用方式 GB/T 7714	Yang Shuichang,Liao Zhijun,Liu Zhenliang,et al. Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:564-567.
APA	Yang Shuichang,Liao Zhijun,Liu Zhenliang,Fan Qiang,Wu Dengxue,&Lu Tiecheng.(2009).Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation.RARE METAL MATERIALS AND ENGINEERING,38,564-567.
MLA	Yang Shuichang,et al."Fabrication and Surface Analysis of Boron Carbide Thin Films by Electron Beam Evaporation".RARE METAL MATERIALS AND ENGINEERING 38(2009):564-567.